Vacuum ultraviolet reflectometer having collimated beam

A method of collecting reflectance data from a sample utilizing a reflectometer, including collecting reflectance data for wavelengths below deep ultra-violet (DUV) wavelengths, the method comprising:

• creating light wavelengths including wavelengths below DUV wavelengths, the light being utilized to create at least one light beam in the reflectometer;
• transmitting the light beam through a plurality of environmentally controlled chambers;
• controlling the environment within the plurality of environmentally controlled chambers to allow transmission of wavelengths below DUV light;
• and
• directing the light beam on a sample to generate reflectance data,
• wherein at least a portion of the light beam is a collimated light beam that is transmitted between at least two of the plurality of environmentally controlled chambers.

A reflectometer for obtaining reflectance data from a sample, the reflectometer comprising:

• a plurality of environmentally controlled chambers so as to allow transmission of wavelengths below DUV wavelengths;
• at least a first coupling mechanism that optically couples two or more of the environmentally controlled chambers;
• and
• a light source that creates a light beam utilized in the reflectometer to obtain reflectance data, the light beam transmitted at least at times through the at least one coupling mechanism, the light beam being collimated at least at the point of transmission through the coupling mechanism.

A reflectometer for obtaining reflectance data from a sample, the reflectometer comprising:

• a plurality of environmentally controlled chambers;
• a first coupling mechanism that optically couples two or more of the environmentally controlled chambers;
• a light source that creates a light beam utilized in the reflectometer to obtain reflectance data, the light beam transmitted at least at times through the at least one coupling mechanism, the light beam being collimated at least at the point of transmission through the coupling mechanism;
• and
• a second coupling mechanism optically coupling at least two or more of the plurality of environmentally controlled chambers, the light being collimated when it passes through both the first and second coupling mechanisms, the first and second coupling mechanisms being coupled to a sample chamber.

A reflectometer for obtaining reflectance data from a sample, the reflectometer comprising:

• a plurality of environmentally controlled chambers;
• at least a first coupling mechanism that optically couples two or more of the environmentally controlled chambers;
• and
• a light source that creates a light beam utilized in the reflectometer to obtain reflectance data, the light beam transmitted at least at times through the at least one coupling mechanism, the light beam being collimated at least at the point of transmission through the coupling mechanism,
• wherein at least one of the environmentally controlled chambers is a sample chamber that contains at least one focusing optical element.