G01C 19/5621
The devices involving a micromechanical structure
Official title: the devices involving a micromechanical structure
G01C19/5621 (The devices involving a micromechanical structure) appears on 119 US grants and 146 published applications in this corpus.
Search patents in G01C- Granted patents
- 119
- Published applications
- 146
- Assignees
- 54
- Inventors
- 229
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 3 | 0 |
| 2001 | 0 | 1 |
| 2002 | 2 | 0 |
| 2003 | 2 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 3 |
| 2006 | 2 | 4 |
| 2007 | 1 | 3 |
| 2008 | 5 | 1 |
| 2009 | 1 | 6 |
| 2010 | 2 | 3 |
| 2011 | 4 | 3 |
| 2012 | 1 | 9 |
| 2013 | 7 | 18 |
| 2014 | 6 | 12 |
| 2015 | 15 | 5 |
| 2016 | 7 | 7 |
| 2017 | 6 | 6 |
| 2018 | 5 | 11 |
| 2019 | 5 | 12 |
| 2020 | 11 | 15 |
| 2021 | 7 | 5 |
| 2022 | 11 | 4 |
| 2023 | 4 | 7 |
| 2024 | 4 | 3 |
| 2025 | 4 | 2 |
| 2026 | 1 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Vibrating gyrometer with planar structure15 Sep 2026US 12,736,344 B2Office National D’Etudes Et De Recherches AéRospatiales
- Method for manufacturing vibration element2 Dec 2025US 12,489,412 B2Seiko Epson Corporation
- Precision gyroscope mode-matching insensitive to rate input15 Jul 2025US 12,359,917 B2The Regents of the University of California
- Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle18 Mar 2025US 12,255,619 B2Seiko Epson Corporation
- Method for manufacturing vibration element28 Jan 2025US 12,213,381 B2Seiko Epson Corporation
- Piezoelectric microelectromechanical device and method of manufacture20 Aug 2026US 2026/0247864 A1Aalto University Foundation sr
- Vibratory Gyro Element and Gyroscope13 Aug 2026US 2026/0235406 A1Sumitomo Precision Products Co., Ltd.
- Silicon mems gyroscopes with upper and lower sense plates30 Apr 2026US 2026/0118125 A1The Charles Stark Draper Laboratory, Inc.
- Mechanically amplified high-precision, high-stability angular rate sensors23 Apr 2026US 2026/0110537 A1Shanghai Roadix Technology Co., Ltd
- Electronic Structure, Inertial Measurement Unit, Electronic Apparatus, And Moving Object12 Mar 2026US 2026/0070779 A1Seiko Epson Corporation
Most cited
By later US patents
- Sensor having a resonance structure, especially an acceleration or rotation rate sensor, and a device for carrying out a self-test60US 6,564,637 B1EADS Deutschland GmbH · 2003
- Thin film micromechanical resonator gyro34US 5,438,231 ARockwell International Corporation · 1995
- Vibrator, vibratory gyroscope, and linear accelerometer25US 6,046,531 ANGK Insulators, Ltd. · 2000
- Silicon inertial sensors formed using MEMS19US 7,360,422 B2University of Southern California · 2008
- Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures18US 9,217,756 B2The Regents of the University of California · 2015