US 12,255,619 B2Granted

Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle

AssigneeSeiko Epson Corporation

InventorsSeiichiro Ogura, Keiichi Yamaguchi, Masahiro Oshio, Takashi Yamazaki

Life of this patent

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Abstract

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Claims20

Dependent claims

A vibration element comprising:

three axes orthogonal to each other being defined as an X axis, a Y axis, and a Z axis;
a base;
and
a vibrating arm extending from the base in a Y axis direction along the Y axis;
wherein the vibrating arm comprises:
an arm section located on a side of the base;
and
a weight section located on a tip side of the arm section and including a first principal surface and a second principal surface having a front-back relationship in a Z axis direction along the Z axis;
a weight film arranged on a side of the second principal surface of the weight section;
wherein the weight section comprises:
a first portion;
and
a second portion that is thinner in the Z axis direction than the first portion;
wherein the second portion is arranged on both sides of the first portion in a cross-sectional view from the Y axis direction,
a center of gravity of the weight section is closer to a first principal surface side than a center plane of the arm section, the center plane passing through a center in the Z axis direction of the arm section and being parallel to an X-Y plane including the X axis and the Y axis;
a center of gravity of the weight film is closer to the second principal surface than the center plane;
wherein the weight film comprises:
a first weight film disposed on the second principal surface at the first portion;
and
a second weight film disposed on the second principal surface at the second portion;
and
wherein a height from the center plane to a principal surface of the first weight film is higher than a height from the center plane to a principal surface of the second weight film.

19 more elements

A vibration element comprising:

three axes orthogonal to each other being defined as an X axis, a Y axis, and a Z axis;
a base;
and
a vibrating arm extending from the base in a Y axis direction along the Y axis;
wherein the vibrating arm comprises:
an arm section located on a side of the base;
and
a weight section located on a tip side of the arm section and including a first principal surface and a second principal surface having a front-back relationship in a Z axis direction along the Z axis;
a weight film arranged on a second principal surface side of the weight section;
wherein the weight section comprises:
a first portion;
and
a second portion that is thinner in the Z axis direction than the first portion;
wherein the first portion is arranged on both sides of the second portion in a cross-sectional view from the Y axis direction,
a center of gravity of the weight section is closer to a first principal surface side than a center plane of the arm section, the center plane passing through a center in the Z axis direction of the arm section and being parallel to an X-Y plane including the X axis and the Y axis;
a center of gravity of the weight film is closer to the second principal surface than the center plane;
wherein the weight film comprises:
a first weight film disposed on the second principal surface at the first portion;
and
a second weight film disposed on the second principal surface at the second portion;
and
wherein a height from the center plane to a principal surface of the first weight film is higher than a height from the center plane to a principal surface of the second weight film.

19 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/446,074Filed 8 Aug 2023 · continuation
Priority: JP 2018-00917323 Jan 2018
Published: US 2023/0109944 A130 Nov 2023
Granted: 18 Mar 2025
Term ends: Not estimatedThe source records don’t support an estimate.

Classification16 codes

H03H 9/21
Constructional features of resonators consisting of piezoelectric or electrostrictive material: crystal tuning forks
G01C 19/5607
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: using vibrating tuning forks
G01C 19/5621
Using vibrating tuning forks: the devices involving a micromechanical structure
G01C 19/5628
Using vibrating tuning forks: manufacturing; Trimming; Mounting; Housings

Family

Application16/253,712Parent of this continuation · filed 22 Jan 2019
Application17/243,632Parent of this continuation · filed 29 Apr 2021
US 11,025,222 B2Parent of this continuation · filed 1 Jun 2021
Application18/081,084Parent of this continuation · filed 14 Dec 2022
US 11,595,026 B2Parent of this continuation · filed 28 Feb 2023
US 2023/0387885 A1Pre-grant publication · published 30 Nov 2023
US 11,888,464 B2Parent of this continuation
US 2019/0229706 A1Published application
US 2021/0313959 A1Published application
US 2023/0109944 A1Published application
US 12,255,619 B2This patent

From the US filing history. Foreign family members aren’t listed.