Vibrator, vibratory gyroscope, and linear accelerometer

A single crystal vibrator, comprising:

• a fixing part having fixed ends,
• a base part including a fixed end connected to a first side of said fixing part,
• a first leg extending in a direction crossing said base part,
• a second leg extending in a direction crossing said base part and being opposed to said first leg with respect to said base part,
• a first bending-vibration piece extending in a direction crossing said first leg,
• a second bending-vibration piece extending in a direction crossing said first leg and being opposite to said first bending-vibration piece with respect to said first leg,
• a third bending-vibration piece extending in a direction crossing said second leg,
• a fourth bending-vibration piece extending in a direction crossing said second leg and being opposite to said third bending-vibration piece with respect to said second leg, and
• resonant arms connected to a second side of said fixing part.

A single crystal vibrator, comprising:

• a base part including a fixed end,
• a first leg extending in a direction crossing said base part,
• a second leg extending in a direction crossing said base part and being opposite to said first leg with respect to said base part, said first and second legs being joined with said base part at an intersecting part,
• a first vibration system provided on one side of said first leg,
• a second vibration system provided on the other side of said first leg,
• a third vibration system provided on one side of said second leg,
• a fourth vibration system provided on the other side of said second leg, and
• a projection part extending in a direction opposite to said base part from said intersecting part,
• wherein (i) a vibration of the center of gravity of said first vibration system is symmetrical in phase to a vibration of the center of gravity of said second vibration system with respect to said first leg, (ii) a vibration of the center of gravity of said third vibration system is symmetrical in phase to a vibration of the center of gravity of said fourth vibration system with respect to said second leg, and (iii) said base part, said first and second legs, said first, second, third and fourth bending-vibration systems, and said projection part all are substantially planar and lie in the same plane.

A single crystal vibrator, comprising:

• a base part including a fixed end,
• a first leg extending in a direction crossing said base part,
• a second leg extending in a direction crossing said base part and being opposite to said first leg with said base part as an axis, said first and second legs being joined with said base part at an intersecting part,
• a first vibration system provided on one side of said first leg,
• a second vibration system provided on the other side of said first leg,
• a third vibration system provided on one side of said second leg,
• a fourth vibration system provided on the other side of said second leg, and
• a projection part extending in a direction opposite to said base part from said intersecting part,
• wherein (i) a vibration of the center of gravity in a vibration of the whole vibration system comprising said first leg, said first vibration system and said second vibration system is symmetrical in phase to a vibration of the center of gravity in a vibration of the whole vibration system comprising said second leg, said third vibration system and said fourth vibration system with respect to said base part, and (ii) said base part, said first and second legs, said first, second, third and fourth bending-vibration systems, and said projection part all are substantially planar and lie in the same plane.

A vibrator, comprising:

• a fixing part,
• a base part including a fixed end connected to said fixing part,
• a first leg extending in a direction crossing said base part,
• a second leg extending in a direction crossing said base part and being opposed to said first leg with respect to said base part,
• a first bending-vibration piece extending in a direction crossing said first leg,
• a second bending-vibration piece extending in a direction crossing said first leg and being opposite to said first bending-vibration piece with respect to said first leg,
• a third bending-vibration piece extending in a direction crossing said second leg,
• a fourth bending-vibration piece extending in a direction crossing said second leg and being opposite to said third bending-vibration piece with respect to said second leg, and
• first and second resonant arms projecting from said fixing part and resonating with vibration of said base part.

A vibrator, comprising:

• a base part including a fixed end,
• a first leg extending in a direction crossing said base part,
• a second leg extending in a direction crossing said base part and being opposed to said first leg with respect to said base part,
• a first bending-vibration piece extending in a direction crossing said first leg,
• a second bending-vibration piece extending in a direction crossing said first leg and being opposite to said first bending-vibration piece with respect to said first leg,
• a third bending-vibration piece extending in a direction crossing said second leg, and
• a fourth bending-vibration piece extending in a direction crossing said second leg and being opposite to said third bending-vibration piece with respect to said second leg,
• wherein a through hole is formed in each of the bending-vibration pieces, extending in a longitudinal direction of said bending-vibration pieces.