G01B 7/063
Using piezoelectric resonators
Official title: {using piezoelectric resonators}
G01B7/063 (Using piezoelectric resonators) appears on 45 US grants and 38 published applications in this corpus.
Search patents in G01B- Granted patents
- 45
- Published applications
- 38
- Assignees
- 47
- Inventors
- 116
- Latest grant
- 7 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 4 | 0 |
| 1986 | 2 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 2 | 2 |
| 2003 | 1 | 1 |
| 2004 | 3 | 2 |
| 2005 | 0 | 3 |
| 2006 | 1 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 1 | 1 |
| 2010 | 0 | 1 |
| 2011 | 0 | 3 |
| 2012 | 0 | 2 |
| 2013 | 2 | 0 |
| 2014 | 1 | 1 |
| 2015 | 1 | 2 |
| 2016 | 2 | 5 |
| 2017 | 0 | 5 |
| 2018 | 3 | 2 |
| 2019 | 5 | 0 |
| 2020 | 2 | 2 |
| 2021 | 1 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 1 |
| 2024 | 0 | 1 |
| 2025 | 2 | 4 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Vibration sensor and methods for deposition monitoring7 Apr 2026US 12,596,030 B2General Electric Company
- Methods for measuring a magnetic core layer profile in an integrated circuit15 Jul 2025US 12,363,920 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Monitoring thin film deposition18 Feb 2025US 12,227,846 B2Inficon GmbH
- Crystal oscillation probe structure and evaporation device27 Apr 2021US 10,988,840 B2Boe Technology Group Co., Ltd.
- Monitoring thin film deposition7 Jul 2020US 10,704,150 B2Inficon GmbH
- Methods for measuring a magnetic core layer profile in an integrated circuit2 Oct 2025US 2025/0311251 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Calibration assembly for a lithium deposition process, lithium deposition apparatus, and method of determining a lithium deposition rate in a lithium deposition process3 Apr 2025US 2025/0109486 A1
- Weight and/or layer thickness measuring equipment and substrate processing systems and methods including such equipment3 Apr 2025US 2025/0109978 A1ASM IP Holding B. V.
- Vibration sensor and methods for deposition monitoring16 Jan 2025US 2025/0020506 A1General Electric Company
- System and method for deconvolution of real-time mass from the influence of temperature and pressure on crystal microbalance18 Jul 2024US 2024/0241083 A1Inficon GmbH
Most cited
By later US patents
- Piezoelectric contamination detector87US 4,561,286 ALaboratoire Suisse de Recherches Horlogeres · 1985
- Control of deposition of thin films49US 4,311,725 ANational Research Development Corporation · 1982
- Measuring and controlling deposition on a piezoelectric monitor crystal34US 5,112,642 ALeybold Inficon, Inc. · 1992
- Control circuitry for quartz crystal deposition monitor24US 5,117,192 ALeybold Inficon, Inc. · 1992
- Apparatus for measuring thickness differences in record carriers, such as bank notes and the like22US 4,068,385 AGAO Gesellschaft fur Automation und Organisation mbH · 1978