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US 10,704,150 B2Granted
Monitoring thin film deposition
AssigneeInficon GmbH
InventorMohamed Buhary Rinzan
Life of this patent
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Abstract
A system for monitoring thin film deposition is described. The system includes a quartz crystal and a synthesizer to generate a modulated signal. The modulated signal is to be grounded through the quartz crystal. The system also includes a phase detector to determine a phase of the modulated signal from the quartz crystal in order to monitor thin film deposition. A modulation index can be selected so that, at resonance, high frequency of the signal matches the crystal frequency.
Claims7
A method for monitoring thin film deposition in a deposition chamber, comprising:
- generating, by the synthesizer, a modulated signal using a low frequency signal selected in the range of 1 Hz to 1000 Hz and a high frequency signal, the high frequency signal being swept through the range of 4 MHz to 7 MHz;
- grounding the quartz crystal located in the deposition chamber;
- producing an amplitude modulated signal by the quartz crystal drawing current from a component of the modulated signal generated by the synthesizer;
- demodulating the amplitude modulated signal producing an envelope of the amplitude modulated signal;
- and
- measuring a phase of the envelope, during the generating of the modulated signal including the high frequency signal being swept, to determine a thin film deposition thickness, wherein the phase of the envelope being equal to the phase of the low frequency signal of the modulated signal when the high frequency signal is swept through a specific frequency in the range indicates that the quartz crystal is in resonance at the high frequency signal with the specific frequency given the thin film deposition thickness.
3 more elements
Dependencies are inferred from the claim text.