G01B 2290/30
Grating as beam-splitter
G01B2290/30 (Grating as beam-splitter) appears on 136 US grants and 86 published applications in this corpus.
Search patents in G01B- Granted patents
- 136
- Published applications
- 86
- Assignees
- 82
- Inventors
- 256
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 3 | 0 |
| 1993 | 4 | 0 |
| 1994 | 6 | 0 |
| 1995 | 0 | 0 |
| 1996 | 6 | 0 |
| 1997 | 2 | 0 |
| 1998 | 4 | 0 |
| 1999 | 2 | 0 |
| 2000 | 4 | 0 |
| 2001 | 6 | 0 |
| 2002 | 2 | 3 |
| 2003 | 6 | 4 |
| 2004 | 2 | 4 |
| 2005 | 2 | 9 |
| 2006 | 7 | 7 |
| 2007 | 7 | 2 |
| 2008 | 4 | 6 |
| 2009 | 8 | 4 |
| 2010 | 0 | 4 |
| 2011 | 4 | 4 |
| 2012 | 1 | 5 |
| 2013 | 4 | 1 |
| 2014 | 6 | 1 |
| 2015 | 2 | 2 |
| 2016 | 2 | 2 |
| 2017 | 5 | 5 |
| 2018 | 5 | 5 |
| 2019 | 3 | 1 |
| 2020 | 4 | 5 |
| 2021 | 4 | 2 |
| 2022 | 3 | 6 |
| 2023 | 1 | 1 |
| 2024 | 4 | 1 |
| 2025 | 4 | 2 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Optical displacement sensor18 Aug 2026US 12,710,264 B2Sensibel AS
- Measuring device for interferometric shape measurement10 Mar 2026US 12,571,985 B2Carl Zeiss SMT GmbH
- Littrow grating interferometry device and use thereof19 Aug 2025US 12,392,602 B1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
- Optical displacement sensor12 Aug 2025US 12,385,735 B2Sensibel AS
- Measurement method for interferometrically determining a surface shape17 Jun 2025US 12,332,043 B2Carl Zeiss SMT GmbH
- Self-Configuration and Error Correction in Linear Photonic Circuits13 Mar 2025US 2025/0085100 A1Massachusetts Institute of Technology
- Optical Displacement Sensor9 Jan 2025US 2025/0012561 A1Sensibel AS
- Optical Displacement Sensor22 Feb 2024US 2024/0060768 A1Sensibel AS
- System for precision displacement measurement based on self-traceable grating interference9 Feb 2023US 2023/0042098 A1Tongji University
- Measuring device for interferometric shape measurement8 Dec 2022US 2022/0390709 A1Carl Zeiss SMT GmbH
Most cited
By later US patents
- Optical alignment apparatus having multiple parallel alignment marks115US 5,808,742 AMassachusetts Institute of Technology · 1998
- Optical translation measurement92US 6,330,057 B1Otm Technologies Ltd. · 2001
- Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components83US 7,561,280 B2Agilent Technologies, Inc. · 2009
- Three wavelength optical measurement apparatus and method78US 5,153,669 AHughes Danbury Optical Systems, Inc. · 1992
- Optical translation measurement76US 6,452,683 B1Otm Technologies Ltd. · 2002