Measuring device for interferometric shape measurement

A measurement apparatus for interferometric shape measurement of a surface of a test object, comprising:

• a diffractive optical element configured to generate a test wave from incoming measurement radiation and to radiate the test wave onto the surface of the test object,
• a deflection element disposed upstream of the diffractive optical element in a beam path of the measurement radiation, and
• a holding device configured to hold the deflection element and to change a position of the deflection element by a combination of a tilting movement and a translational movement, wherein the combination of the tilting movement and the translational movement is realized by a rotational movement with respect to an axis of rotation, wherein the axis of rotation is located at a distance of at least 2 mm from a geometric centroid of the deflection element.

A method for interferometric shape measurement of a respective surface of a plurality of test objects, comprising:

• radiating measurement radiation onto a first diffractive optical element with a deflection element to generate a first test wave, and interferometrically measuring a surface shape of a first of the test objects using the first test wave,
• changing a position of the deflection element relative to the measurement radiation radiated onto the deflection element through a combination of a tilting movement and a translational movement wherein the titling movement and the translational movement of the deflection element is independent from other optical elements, and
• radiating the measurement radiation onto a second diffractive optical element with the deflection element subsequent to said changing of the position to generate a second test wave, and interferometrically measuring a surface shape of a second of the test objects using the second test wave.