Optical translation measurement
AssigneeOtm Technologies Ltd.
InventorsGilad Lederer, Opher Kinrot, Uri Kinrot
Life of this patent
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Abstract
A method for determining the relative motion of a surface with respect to a measurement device comprising: illuminating the surface from a source with incident illumination, such that illumination is reflected from portions of the surface toward a detector; spatially filtering the reflected illumination such that the phase of the detected optical illumination from a given scatterer on the surface is substantially constant or linearly related to the translation of the surface; generating a signal by the detector responsive to the illumination incident on the detector; and determining the relative motion of the surface from the signal.
Claims34
A method for determining the relative motion of a surface with respect to a measurement device comprising:
- illuminating the surface from a source with incident illumination, such that illumination is diffusely reflected from portions of the surface towards a detector;
- spatially filtering the diffusely reflected illumination such that the phase of the detected optical illumination from a given scatterer on the surface is substantially constant or linearly related to the translation of the surface;
- generating a signal by the detector responsive to the illumination incident on the detector;
- and
- determining the relative motion of the surface in a direction parallel to the surface from the signal;
- wherein illuminating the surface comprises illuminating the surface through a partially reflecting object placed adjacent to the surface which object reflects or diffracts illumination to the detector.
A method for determining the relative motion of a surface with respect to a measurement device comprising:
- illuminating the surface with illumination through a partially transmitting object that is not attached to the surface and is operative to cause spatial variation of the illumination on the surface, such that said illumination is reflected from the surface to illuminate a detector with diffusely reflected illumination which is not an image of a point on or a portion of the surface;
- simultaneously illuminating the detector with reference illumination derived from said incident illumination;
- coherently detecting the reflected illumination received by the detector utilizing said reference illumination such that the detector generates a signal;
- determining the relative motion of the surface parallel to the surface, based on variations of the signal with time.
A method for determining the relative motion of a surface with respect to a measurement device comprising:
- illuminating the surface with illumination having a coherence length, such that illumination is reflected from portions of the surface;
- placing a grating within the coherence length from the surface;
- coherently detecting diffusely reflected illumination reflected from the surface, and utilizing illumination reflected from or diffracted by the grating as a local oscillator to form a signal;
- and
- determining the relative motion of the surface, in a direction parallel to the surface, from a characteristic of the signal.
A method for determining the relative motion of a surface with respect to a measurement device comprising:
- illuminating the surface from a source, with spatially varying incident illumination, such that a portion of the illumination is diffusely reflected from portions of the surface towards a detector;
- spatially filtering the diffusely reflected illumination such that only illumination reflected from the surface substantially in a single direction is detected by the detector;
- generating a signal by the detector responsive to the illumination incident on the detector;
- and
- determining the relative motion of the surface in a direction parallel to the surface from the signal, responsive to a characteristic of the spatial variation.
Dependencies are inferred from the claim text.