Measurement method for interferometrically determining a surface shape
AssigneeCarl Zeiss SMT GmbH
InventorsHans Michael Stiepan, Sebastian Fuchs, Jochen Hetzler
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AssigneeCarl Zeiss SMT GmbH
InventorsHans Michael Stiepan, Sebastian Fuchs, Jochen Hetzler
Estimating the term…
Measurement method for interferometrically determining a shape of a test object (14) surface (12) includes arranging a first diffractive optical element (30, 130, 230) in an input wave (18) beam path, to generate a first test wave (34) with a wavefront that is adapted to a desired shape of the optical surface, detecting a first interferogram generated by the first test wave after interaction with the test object surface, arranging a different diffractive optical element (32, 232) in the input wave beam path for generating a further test wave with a wavefront which is adapted to the desired shape of the optical surface, the first and the further diffractive optical elements differing in their respective diffraction structure configurations, capturing a further interferogram generated by the further test wave after interaction with the test object surface, and determining the surface shape of the test object by calculating the two interferograms.
A method for designing phase gratings, comprising:
A method for designing phase gratings, comprising:
Dependencies are inferred from the claim text.