G01B 11/028
By measuring lateral position of a boundary of the object
Official title: {by measuring lateral position of a boundary of the object (G01B11/022, G01B11/024, G01B11/04 take precedence)}
G01B11/028 (By measuring lateral position of a boundary of the object) appears on 265 US grants and 207 published applications in this corpus.
Search patents in G01B- Granted patents
- 265
- Published applications
- 207
- Assignees
- 219
- Inventors
- 647
- Latest grant
- 2 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 2 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 3 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 5 | 0 |
| 1986 | 3 | 0 |
| 1987 | 7 | 0 |
| 1988 | 6 | 0 |
| 1989 | 9 | 0 |
| 1990 | 7 | 0 |
| 1991 | 5 | 0 |
| 1992 | 4 | 0 |
| 1993 | 3 | 0 |
| 1994 | 5 | 0 |
| 1995 | 3 | 0 |
| 1996 | 1 | 0 |
| 1997 | 3 | 0 |
| 1998 | 5 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 7 | 1 |
| 2002 | 4 | 7 |
| 2003 | 4 | 6 |
| 2004 | 8 | 10 |
| 2005 | 7 | 9 |
| 2006 | 5 | 1 |
| 2007 | 4 | 7 |
| 2008 | 5 | 1 |
| 2009 | 6 | 5 |
| 2010 | 4 | 5 |
| 2011 | 2 | 11 |
| 2012 | 7 | 8 |
| 2013 | 4 | 13 |
| 2014 | 6 | 10 |
| 2015 | 14 | 9 |
| 2016 | 8 | 3 |
| 2017 | 12 | 3 |
| 2018 | 3 | 6 |
| 2019 | 5 | 17 |
| 2020 | 8 | 11 |
| 2021 | 8 | 15 |
| 2022 | 9 | 8 |
| 2023 | 9 | 11 |
| 2024 | 15 | 16 |
| 2025 | 11 | 7 |
| 2026 | 6 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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Most cited
By later US patents
- Measurement method for linewidth metrology67US 5,914,784 AInternational Business Machines Corporation · 1999
- Process for polishing and analyzing a layer over a patterned semiconductor substrate64US 5,461,007 AMotorola, Inc. · 1995
- Fine structure evaluation apparatus and method59US 5,270,794 ACanon Kabushiki Kaisha · 1993
- Enhanced optical detection of minimum features using depolarization57US 6,020,966 AInternational Business Machines Corporation · 2000
- Apparatus and method for dimensional weighing utilizing a laser scanner or sensor49US 5,770,864 APitney Bowes Inc. · 1998