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US 12,584,857 B2Granted
Method and apparatus for transmittance measurements of large articles
AssigneeASM IP Holding B.V.
InventorsShiva K.T. Rajavelu Muralidhar, Youness Alvandi-Tabrizi, John DiSanto, Sam Kim
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Abstract
Methods and apparatus for measuring light intensity are disclosed. The methods and apparatus can be used to verify an article, such as a reaction chamber. Exemplary apparatus include a first arm, a light source coupled to the first arm, a second arm, and a sensor coupled to the second arm. The sensor can receive light from the light source that is transmitted through at least a portion of the article.
Claims18
An apparatus for verifying an article, the apparatus comprising:
- a first arm;
- a light source coupled to the first arm;
- a second arm;
- a first motor to cause the first arm and the second arm to move in a first direction;
- a second motor to cause the first arm and the second arm to move in a second direction;
- a member coupled to the first arm and the second arm, wherein a distance between the first arm and the second arm is adjustable;
- a reflective surface coupled to the second arm;
- a sensor coupled to the second arm, wherein the sensor is configured to measure light intensity;
- and
- a shield coupled to the second arm, wherein the shield comprises a first aperture disposed between the light source and the reflective surface and a second aperture disposed between the reflective surface and the sensor,
- wherein the light source emits light through the article,
- wherein the first direction and the second direction are linear directions, and
- wherein the sensor receives light from the light source that is transmitted through the article.
10 more elements
Dependencies are inferred from the claim text.