F16C 32/0611
By means of vibrations
Official title: {by means of vibrations}
F16C32/0611 (By means of vibrations) appears on 18 US grants and 10 published applications in this corpus.
Search patents in F16C- Granted patents
- 18
- Published applications
- 10
- Assignees
- 13
- Inventors
- 39
- Latest grant
- 13 Feb 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 2 | 0 |
| 1986 | 2 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 2 |
| 2003 | 1 | 0 |
| 2004 | 1 | 0 |
| 2005 | 1 | 0 |
| 2006 | 0 | 1 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 1 |
| 2018 | 0 | 1 |
| 2019 | 1 | 0 |
| 2020 | 1 | 1 |
| 2021 | 1 | 1 |
| 2022 | 0 | 1 |
| 2023 | 1 | 0 |
| 2024 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method13 Feb 2024US 11,898,601 B2ASML Netherlands B. V.
- Measuring drive having ultrasound-mounted shaft, measuring device, method and use5 Sep 2023US 11,747,253 B2Anton Paar GmbH
- Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method24 Aug 2021US 11,098,759 B2ASML Netherlands B. V.
- Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method7 Jan 2020US 10,527,092 B2ASML Netherlands B. V.
- Ultrasonic near field hot glass transportation and forming10 Sep 2019US 10,407,335 B2Corning Incorporated
- Measuring Drive Having Ultrasound-Mounted Shaft, Measuring Device, Method and Use13 Jan 2022US 2022/0011210 A1Anton Paar GmbH
- Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method9 Dec 2021US 2021/0381548 A1ASML Netherlands B. V.
- Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method7 May 2020US 2020/0141445 A1ASML Netherlands B. V.
- Ultrasonic near field hot glass transportation and forming11 Oct 2018US 2018/0290912 A1Coming Incorporated
- Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method12 Oct 2017US 2017/0292566 A1ASML Netherlands B. V.
Most cited
By later US patents
- Planar and cylindrical oscillating pneumatodynamic bearings25US 4,666,315 AInternational Business Machines Corporation · 1987
- Object levitating apparatus object transporting apparatus and object levitating bearing along with an object levitating process and object transporting process25US 5,810,155 AKaijo Corporation · 1998
- Tubular squeeze bearing apparatus with rotational restraint16US 4,630,941 AInternational Business Machines Corporation · 1986
- Object levitating apparatus, object transporting apparatus, and object levitating bearing along with an object levitating process and object transporting process11US 5,890,580 AKaijo Corporation · 1999
- Dynamic pressure bearing7US 5,322,369 AEbara Corporation · 1994