F16C 32/0603
Supported by a gas cushion
Official title: {supported by a gas cushion, e.g. an air cushion}
F16C32/0603 (Supported by a gas cushion) appears on 578 US grants and 478 published applications in this corpus.
Search patents in F16C- Granted patents
- 578
- Published applications
- 478
- Assignees
- 295
- Inventors
- 1,053
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 6 | 0 |
| 1978 | 3 | 0 |
| 1979 | 0 | 0 |
| 1980 | 6 | 0 |
| 1981 | 1 | 0 |
| 1982 | 3 | 0 |
| 1983 | 6 | 0 |
| 1984 | 4 | 0 |
| 1985 | 7 | 0 |
| 1986 | 9 | 0 |
| 1987 | 7 | 0 |
| 1988 | 11 | 0 |
| 1989 | 8 | 0 |
| 1990 | 5 | 0 |
| 1991 | 5 | 0 |
| 1992 | 4 | 0 |
| 1993 | 8 | 0 |
| 1994 | 8 | 0 |
| 1995 | 7 | 0 |
| 1996 | 6 | 0 |
| 1997 | 5 | 0 |
| 1998 | 10 | 0 |
| 1999 | 4 | 0 |
| 2000 | 6 | 0 |
| 2001 | 11 | 6 |
| 2002 | 17 | 16 |
| 2003 | 18 | 12 |
| 2004 | 10 | 16 |
| 2005 | 7 | 7 |
| 2006 | 13 | 17 |
| 2007 | 15 | 6 |
| 2008 | 3 | 11 |
| 2009 | 5 | 12 |
| 2010 | 7 | 19 |
| 2011 | 11 | 10 |
| 2012 | 9 | 10 |
| 2013 | 10 | 10 |
| 2014 | 20 | 23 |
| 2015 | 13 | 24 |
| 2016 | 19 | 22 |
| 2017 | 18 | 28 |
| 2018 | 26 | 32 |
| 2019 | 32 | 30 |
| 2020 | 37 | 44 |
| 2021 | 30 | 24 |
| 2022 | 22 | 22 |
| 2023 | 26 | 25 |
| 2024 | 26 | 22 |
| 2025 | 20 | 19 |
| 2026 | 9 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Hydrostatic gas bearing with humidity removed by electrical heating25 Aug 2026US 12,716,451 B2Wuhan Second Ship Design and Research Institute
- Static gas thrust bearing18 Aug 2026US 12,710,050 B2Garrett Transportation I Inc.
- Air bearing shaft with wide operating temperature range11 Aug 2026US 12,706,271 B2APPLIED Materials.Inc.
- Self-dehumidifying hydrostatic gas bearing16 Jun 2026US 12,655,871 B2Wuhan Second Ship Design and Research Institute
- Hydrostatic gas bearing configured to remove humidity by heat exchanging12 May 2026US 12,624,731 B2Wuhan Second Ship Design and Research Institute
- High speed electrical machine1 Oct 2026US 2026/0302869 A1Celeroton Turbocell AG
- High speed electrical machine1 Oct 2026US 2026/0302870 A1Celeroton Turbocell AG
- Ultrasonic air bearing spindle device13 Aug 2026US 2026/0233351 A1RPS Corporation
- Hybrid bearing stage6 Aug 2026US 2026/0226941 A1
- High-low temperature and high-frequency angular vibration device based on hydrostatic bearing system23 Jul 2026US 2026/0210797 A1Beijing Aerospace Institute for Metrology and Measurement Technology
Most cited
By later US patents
- Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses483US 6,603,130 B1ASML Netherlands B. V. · 2003
- Movement guiding mechanism86US 4,916,340 ACanon Kabushiki Kaisha · 1990
- Positioning device comprising pre-stressed contactless bearings65US 4,628,238 AU. S. Philips Corporation · 1986
- Stabilizing a substrate using a vacuum preload air bearing chuck62US 7,607,647 B2KLA-Tencor Technologies Corporation · 2009
- Positioning system and method and apparatus for device manufacture57US 5,858,587 ACanon Kabushiki Kaisha · 1999