Hybrid bearing stage
OwnerAviv BALANinventor
Life of this patent
Estimating the term…
Abstract
A hybrid bearing stage includes at least one guide rail, a carriage translatably coupled to the at least one guide rail, a plurality of air bearings disposed about the carriage, and a mechanical bearing assembly coupled to the at least one guide rail. The mechanical bearing assembly includes a mechanical bearing guide extending along a length of the at least one guide rail, a plurality of bearing blocks coupled to the mechanical bearing guide, a mounting block coupled to the carriage and positioned adjacent the plurality of bearing blocks, and a flexure mechanism extending between the mounting block and the plurality of bearing blocks. The plurality of bearing blocks apply a damping force to the carriage via contact between the plurality of bearing blocks and the mounting block.
Claims20
A hybrid bearing stage comprising:
- at least one guide rail;
- a carriage translatably coupled to the at least one guide rail;
- a plurality of air bearings disposed about the carriage;
- and
- a mechanical bearing assembly coupled to the at least one guide rail, the mechanical bearing assembly comprising:
- a mechanical bearing guide extending along a length of the at least one guide rail;
- a plurality of bearing blocks coupled to the mechanical bearing guide;
- a mounting block coupled to the carriage and positioned adjacent the plurality of bearing blocks;
- and
- a flexure mechanism extending between the mounting block and the plurality of bearing blocks;
- wherein the plurality of bearing blocks apply a damping force to the carriage via contact between the plurality of bearing blocks and the mounting block.
A hybrid bearing stage for inspecting a wafer, the hybrid bearing stage comprising:
- at least one guide rail;
- a carriage that supports the wafer and is translatably coupled to the at least one guide rail;
- a plurality of lateral air bearings positioned between the carriage and a surface of the hybrid bearing stage;
- a plurality of longitudinal air bearings positioned between the carriage and the at least one guide rail;
- a mechanical bearing assembly coupled to the at least one guide rail, the mechanical bearing assembly comprising:
- a mechanical bearing guide extending along a length of the at least one guide rail;
- a plurality of bearing blocks coupled to the mechanical bearing guide;
- a mounting block coupled to the carriage and positioned adjacent the plurality of bearing blocks;
- and
- a flexure mechanism extending between the mounting block and the plurality of bearing blocks;
- wherein the plurality of longitudinal air bearings generate a first pressurized air gap between the carriage and the at least one guide rail, the plurality of lateral air bearings generate a second pressurized air gap between the carriage and the surface of the hybrid bearing stage, and the plurality of bearing blocks apply a damping force to the carriage, such that the damping force does not compromise the first pressurized air gap and the second pressurized air gap.
A method for inspecting a wafer using a hybrid bearing stage, the method comprising:
- activating a plurality of lateral air bearings to generate a first pressurized air gap between a carriage and a surface of the hybrid bearing stage;
- translating the carriage to a desired lateral position on the surface of the hybrid bearing stage;
- activating a plurality of longitudinal air bearings to generate a second pressurized air gap between the carriage and at least one guide rail of the hybrid bearing stage;
- translating the carriage relative the at least one guide rail to a desired longitudinal position on the surface of the hybrid bearing stage;
- engaging a mechanical bearing assembly of the hybrid bearing stage, such that a plurality of bearing blocks apply a damping force to the carriage;
- and
- capturing a high-resolution image of the wafer at an inspection point corresponding to the desired longitudinal position and the desired lateral position.
Dependencies are inferred from the claim text.