B01D 67/0062
By micromachining techniques
Official title: {by micromachining techniques, e.g. using masking and etching steps, photolithography}
B01D67/0062 (By micromachining techniques) appears on 171 US grants and 236 published applications in this corpus.
Search patents in B01D- Granted patents
- 171
- Published applications
- 236
- Assignees
- 145
- Inventors
- 581
- Latest grant
- 2 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 4 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 4 | 0 |
| 1999 | 7 | 0 |
| 2000 | 2 | 0 |
| 2001 | 1 | 1 |
| 2002 | 1 | 1 |
| 2003 | 4 | 3 |
| 2004 | 1 | 8 |
| 2005 | 2 | 11 |
| 2006 | 4 | 17 |
| 2007 | 6 | 14 |
| 2008 | 3 | 10 |
| 2009 | 10 | 10 |
| 2010 | 10 | 17 |
| 2011 | 9 | 6 |
| 2012 | 8 | 16 |
| 2013 | 9 | 9 |
| 2014 | 7 | 11 |
| 2015 | 7 | 14 |
| 2016 | 3 | 13 |
| 2017 | 12 | 5 |
| 2018 | 7 | 10 |
| 2019 | 3 | 9 |
| 2020 | 8 | 4 |
| 2021 | 12 | 9 |
| 2022 | 4 | 6 |
| 2023 | 5 | 9 |
| 2024 | 5 | 12 |
| 2025 | 6 | 5 |
| 2026 | 2 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Selective membranes and related methods18 Jun 2026US 2026/0166478 A1Massachusetts Institute of Technology
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Most cited
By later US patents
- Mesoscale sample preparation device and systems for determination and processing of analytes678US 5,726,026 AThe Trustees of the University of Pennsylvania · 1998
- Mesoscale sample preparation device and systems for determination and processing of analytes335US 5,928,880 AThe Trustees of the University of Pennsylvania · 1999
- Membrane filter and a method of manufacturing the same as well as a membrane218US 5,753,014 A1998
- Mesoscale sample preparation device and systems for determination and processing of analytes182US 6,184,029 B2The Trustees of the University of Pennsylvania · 2001
- Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters171US 5,798,042 AThe Regents of the University of California · 1998