Membrane for a vibrating mesh module

A membrane for a vibrating mesh module for an aerosol-generating device, the membrane comprising:

• a plurality of recesses defining portions of the membrane having reduced thickness, wherein the portions of the membrane having reduced thickness are provided with one or more through-holes defining perforations of the membrane;
• and
• one or more piezo elements integrally formed therewith,
• wherein the through-holes have an aspect ratio of below 1, and
• wherein the through-holes have a diameter of between 0.2 micrometer and 3 micrometers.

A method of manufacturing a membrane for a vibrating mesh module for an aerosol-generating device, the method comprising:

• providing a bulk wafer of a first material, the bulk wafer having opposing first and second surfaces;
• depositing a cover layer of a second material onto a first surface of the bulk wafer;
• providing through-holes to the cover layer using MEMS manufacturing techniques;
• etching the second surface of the bulk wafer to define recesses therein;
• etching the second surface of the bulk wafer until the bulk wafer material is removed from the recesses;
• and
• cutting out the membrane,
• wherein the membrane comprises one or more piezo elements integrally formed therewith,
• wherein the through-holes have an aspect ratio of below 1, and
• wherein the through-holes have a diameter of between 0.2 micrometer and 3 micrometers.

A membrane for a vibrating mesh module for an aerosol-generating device,

• the membrane being made from material appropriate for MEMS manufacturing,
• the membrane comprising a plurality of recesses defining portions of the membrane having reduced thickness,
• wherein the portions of the membrane having reduced thickness are provided with one or more through-holes to define perforations of the membrane,
• wherein the material of the membrane is patterned with an electrically conductive structure,
• wherein the through-holes have an aspect ratio of below 1, and
• wherein the through-holes have a diameter of between 0.2 micrometer and 3 micrometers.