Y10S 427/106
Utilizing plasma
Official title: Utilizing plasma, e.g. corona, glow discharge, cold plasma
Y10S427/106 (Utilizing plasma) appears on 57 US grants and 13 published applications in this corpus.
Search patents in Y10S- Granted patents
- 57
- Published applications
- 13
- Assignees
- 39
- Inventors
- 127
- Latest grant
- 15 May 2012
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 2 | 0 |
| 1992 | 2 | 0 |
| 1993 | 4 | 0 |
| 1994 | 4 | 0 |
| 1995 | 7 | 0 |
| 1996 | 1 | 0 |
| 1997 | 7 | 0 |
| 1998 | 2 | 0 |
| 1999 | 8 | 0 |
| 2000 | 4 | 0 |
| 2001 | 2 | 0 |
| 2002 | 1 | 2 |
| 2003 | 1 | 1 |
| 2004 | 0 | 1 |
| 2005 | 2 | 0 |
| 2006 | 0 | 2 |
| 2007 | 0 | 1 |
| 2008 | 1 | 2 |
| 2009 | 0 | 2 |
| 2010 | 2 | 1 |
| 2011 | 2 | 1 |
| 2012 | 2 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Substrate processing apparatus15 May 2012US 8,176,871 B2Hitachi Kokusai Electric Inc.
- Method of making window unit21 Feb 2012US 8,119,199 B2Guardian Industries Corp.
- Si-O containing hydrogenated carbon film, optical device including the same, and method for manufacturing the Si-O containing hydrogenated carbon film and the optical device1 Nov 2011US 8,047,653 B2Sumitomo Electric Industries, Ltd.
- Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof17 May 2011US 7,943,193 B2Hitachi Global Storage Technologies Netherlands B. V.
- Method of making window unit28 Sep 2010US 7,803,427 B2Guardian Industries Corp.
- Method of making window unit6 Jan 2011US 2011/0000602 A1Guardian Industries Corp.
- Si-o containing hydrogenated carbon film, optical device including the same, and method for manufacturing the si-o containing hydrogenated carbon film and the optical device18 Feb 2010US 2010/0039707 A1Sumitomo Electric Industries, Ltd.
- Method of producing semiconductor device16 Jul 2009US 2009/0181547 A1Hitachi Kokusai Electric Inc.
- Substrate Processing Apparatus18 Jun 2009US 2009/0151632 A1Hitachi Kokusai Electric Inc.
- Method and apparatus for making diamond-like carbon films11 Dec 2008US 2008/0305277 A1
Most cited
By later US patents
- Method and apparatus for depositing a multilayered low dielectric constant film324US 5,804,259 AAPPLIED Materials.Inc. · 1998
- Diamond-like carbon films from a hydrocarbon helium plasma262US 5,470,661 AInternational Business Machines Corporation · 1995
- Method for producing fluorinated diamond-like carbon films166US 6,572,937 B2The Regents of the University of California · 2003
- Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films120US 5,352,493 A1994
- Diamond-like metallic nanocomposites118US 5,466,431 A1995