Method and apparatus for depositing a multilayered low dielectric constant film
AssigneeApplied Materials, Inc.
InventorStuardo Robles
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Abstract
A method and apparatus for forming a multilayer insulating film on a substrate involves forming a number of carbon-based layers on the substrate, each interlaid with layers of organic material, such as parylene. Preferably, the carbon-based layers are formed using a high-density plasma chemical vapor deposition system, although other CVD systems may also be used. The result is a multilayer insulating film having a low overall dielectric constant, excellent gap-fill characteristics, and desirable thermal properties.
Claims18
A method for forming an insulating film on a substrate, the method comprising steps of:
- forming a diamond like compound (DLC) film on said substrate;
- forming a polymer film on said DLC film;
- and
- forming a fluorinated DLC film on said polymer film, with said polymer film abutting both said DLC film and said fluorinated DLC film.
A method for forming a dielectric film on a substrate comprising steps of:
- placing said substrate in a deposition zone;
- during a first deposition stage introducing, into said deposition zone, a fluorine source and a carbon source so as to obtain a predetermined ratio of said fluorine source to said carbon source to form a first DLC film on said substrate;
- during a second deposition stage, subsequent to said first deposition stage, forming a polymer film atop said first DLC film and
- during a third deposition stage, subsequent to said second deposition stage, increasing said ratio of said fluorine source to said carbon-source to form a second DLC film atop of said polymer film.
A method for forming a dielectric film on a substrate disposed in a process chamber, said method comprising steps of:
- placing said substrate in a deposition zone of said process chamber;
- forming, on said substrate, a plurality carbon-based layers, with consecutive carbon-based layers having differing thermal conductivity characteristics;
- and
- forming, between said consecutive carbon-based layers, a polymer layer, with said plurality of carbon-based layers having differing quantities of fluorine and carbon present therein with the quantities of fluorine and carbon present in one of said plurality of carbon-based layers being dependent upon a position of said one of said plurality of carbon-based layers amongst said plurality of carbon-based layers so that said quantity of carbon present in said plurality of carbon-based layers decreases as a distance between said plurality of carbon-based layers and said substrate increases.
Dependencies are inferred from the claim text.