US 7,943,193 B2Granted

Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof

AssigneeHitachi Global Storage Technologies Netherlands B.V.

InventorsNaoto Endou, Shigehiko Fujimaki, Hiroyuki Matsumoto, Toshinori Ono

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Abstract

Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.

Claims7

Dependent claims

A method for manufacturing a perpendicular magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon protective film on a nonmagnetic substrate,

wherein the diamond-like carbon protective film is formed by a CVD method in which ethylene gas and hydrogen gas are used in a volume ratio of the hydrogen gas to the ethylene gas (H2/C2H4) of about 0.5 to 2 and a bias voltage is applied to the nonmagnetic substrate while the granular magnetic film is maintained at a temperature of 75° C. or less, wherein the diamond-like carbon protective film has a hydrogen content of less than about 25%, a thickness of the diamond-like carbon protective film being less than 0.5 nm.

Dependencies are inferred from the claim text.

Facts

Application: 11/254,073Filed 18 Oct 2005
Priority: JP 2004-30308118 Oct 2004
Published: US 2006/0083952 A120 Apr 2006
Granted: 17 May 2011
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

G11B 5/8408
Processes or apparatus specially adapted for manufacturing record carriers: protecting the magnetic layer
C23C 16/26
Characterised by the deposition of inorganic material, other than metallic material: deposition of carbon only
G11B 5/667
The record carriers consisting of several layers: including a soft magnetic layer
G11B 5/676
The record carriers consisting of several layers: having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer…