H01S 3/2207
Noble gas ions
Official title: {Noble gas ions, e.g. Ar+>, Kr+>}
H01S3/2207 (Noble gas ions) appears on 91 US grants and 91 published applications in this corpus.
Search patents in H01S- Granted patents
- 91
- Published applications
- 91
- Assignees
- 31
- Inventors
- 185
- Latest grant
- 7 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 1 |
| 2002 | 7 | 28 |
| 2003 | 13 | 8 |
| 2004 | 14 | 16 |
| 2005 | 8 | 8 |
| 2006 | 12 | 2 |
| 2007 | 8 | 2 |
| 2008 | 2 | 2 |
| 2009 | 2 | 0 |
| 2010 | 2 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 2 | 2 |
| 2016 | 1 | 2 |
| 2017 | 6 | 5 |
| 2018 | 3 | 5 |
| 2019 | 2 | 0 |
| 2020 | 1 | 0 |
| 2021 | 1 | 1 |
| 2022 | 0 | 5 |
| 2023 | 1 | 1 |
| 2024 | 1 | 1 |
| 2025 | 2 | 0 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Packed-bed filter for metal fluoride dust trapping in laser discharge chambers7 Apr 2026US 12,597,753 B2Cymer, Inc.
- Laser system and method for the spectral broadening of pulsed laser radiation4 Nov 2025US 12,463,395 B2TRUMPF Scientific Lasers GmbH + Co. KG
- Output light beam formation apparatus27 May 2025US 12,316,063 B2Cymer, Inc.
- Laser16 Jan 2024US 11,876,340 B2Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
- Optical compensation system for laser beam and excimer laser annealing device8 Aug 2023US 11,721,947 B2Boe Technology Group Co., Ltd.
- A device and method for resonant pumping of optical gain medium in a manner orthogonal to a laser mode27 Aug 2026US 2026/0254185 A1Ramot at Tel-Aviv University Ltd.
- Gas laser apparatus, gas laser apparatus maintenance method, and electronic device manufacturing method9 May 2024US 2024/0154381 A1Gigaphoton Inc.
- Packed-bed filter for metal fluoride dust trapping in laser discharge chambers12 Jan 2023US 2023/0008480 A1Cymer, Inc.
- Laser system with optical system for the spectral broadening of pulsed laser radiation and method for the spectral broadening of pulsed laser radiation29 Dec 2022US 2022/0416493 A1TRUMPF Scientific Lasers GmbH + Co. KG
- Optical system for increasing the contrast of pulsed laser radiation, laser system and method for increasing the contrast of pulsed laser radiation15 Dec 2022US 2022/0399695 A1TRUMPF Scientific Lasers GmbH + Co. KG
Most cited
By later US patents
- Very narrow band, two chamber, high rep rate gas discharge laser system144US 6,567,450 B2Cymer, Inc. · 2003
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Extreme repetition rate gas discharge laser with improved blower motor101US 6,477,193 B2Cymer, Inc. · 2002
- Injection seeded laser with precise timing control96US 6,549,551 B2Cymer, Inc. · 2003
- Gas discharge laser with blade-dielectric electrode95US 6,414,979 B2Cymer, Inc. · 2002