Gas laser apparatus, gas laser apparatus maintenance method, and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorsJunichi FUJIMOTO, Akira SUWA
Life of this patent
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Abstract
A gas laser apparatus includes a voltage application circuit, a chamber device that includes an electrode and is configured to output light generated when a voltage is applied to the electrode from the voltage application circuit, a first pallet that includes a mounting surface on which the chamber device and the voltage application circuit are disposed in parallel with each other, and a housing unit in and out of which the first pallet is movable by movement in an in-plane direction of the mounting surface.
Claims19
A gas laser apparatus comprising:
- a voltage application circuit;
- a chamber device that includes an electrode and is configured to output light generated when a voltage is applied to the electrode from the voltage application circuit;
- a first pallet that includes a mounting surface on which the chamber device and the voltage application circuit are disposed in parallel with each other;
- and
- a housing unit in and out of which the first pallet is movable by movement in an in-plane direction of the mounting surface.
A gas laser apparatus maintenance method, comprising,
- when replacing a chamber device and a voltage application circuit of a gas laser apparatus including
- the voltage application circuit,
- the chamber device that includes an electrode and is configured to output light generated when a voltage is applied to the electrode from the voltage application circuit,
- a first pallet that includes a mounting surface on which the chamber device and the voltage application circuit are disposed in parallel with each other, and
- a housing unit in and out of which the first pallet is movable by movement in an in-plane direction of the mounting surface,
- replacing the first pallet altogether.
An electronic device manufacturing method, comprising:
- generating a laser beam by a gas laser apparatus, the gas laser apparatus including
- a voltage application circuit,
- a chamber device that includes an electrode and is configured to output light generated when a voltage is applied to the electrode from the voltage application circuit,
- a first pallet that includes a mounting surface on which the chamber device and the voltage application circuit are disposed in parallel with each other, and
- a housing unit in and out of which the first pallet is movable by movement in an in-plane direction of the mounting surface;
- outputting the laser beam to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser beam within the exposure apparatus to manufacture an electronic device.
Dependencies are inferred from the claim text.