H01J 35/147

Spot size control

Official title: {Spot size control}

H01J35/147 (Spot size control) appears on 336 US grants and 307 published applications in this corpus.

Search patents in H01J
Granted patents
336
Published applications
307
Assignees
150
Inventors
614
Latest grant
29 Sep 2026

Filings by year

H01J 35/147: granted patents and published applications per publication year
YearGranted patentsPublished applications
197730
197850
197950
198010
198100
198210
198320
198400
198520
198650
198740
198840
198930
199030
199160
199220
199310
199400
199520
199620
199750
199880
199930
200010
200153
200242
200352
200447
200527
200689
200777
200883
200938
2010716
2011310
20121014
20131211
20141115
20151433
20161015
20172416
20181721
20191612
20201918
20212420
2022711
20231211
20241217
20251415
2026104

By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.

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