Electron emission source including high-density carbon structure-based film, method for manufacturing the same, and x-ray tube using the same

A method of manufacturing a carbon structure-based electron emission source, comprising:

• a step of providing a carbon structure-based film;
• a step of densifying the carbon structure-based film by immersing the carbon structure-based film in a polar solvent and then in an acidic aqueous solution to obtain a densified carbon structure-based film, or immersing the carbon structure-based film in an acidic aqueous solution and then in a polar solvent to obtain a densified carbon structure-based film;
• and
• a step of fixing the carbon structure-based film, which is disposed between at least two conductive metal members, by applying lateral pressure.

An X-ray tube comprising:

• a tube housing having an internal space;
• a cathode accommodated within the tube housing and disposed at one end of the tube housing, the cathode having a linearly cut carbon structure-based film coupled thereto as an electron emission source;
• a gate electrode disposed above the cathode and having a slit formed therein to align with the carbon structure-based film;
• a focusing lens disposed above the gate electrode;
• and
• an anode accommodated within the tube housing and disposed at the other end of the tube housing to face the cathode,
• wherein the cathode comprises:
• a densified carbon structure-based film;
• and
• a conductive metal member for fixing the carbon structure-based film,
• wherein the conductive metal member includes at least one recess formed to be recessed by a predetermined depth from an upper surface,
• each recess having a depth equal to or greater than the height of the carbon structure-based film by a predetermined length, and
• the carbon structure-based film is disposed across each recess.