US 6,282,263 B1Granted

X-ray generator

AssigneeBede Scientific Instruments Limited

InventorsUlrich Wolfgang Arndt, James Victor Percival Long, Peter Duncumb

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Abstract

An X-ray generator comprises an evacuated and sealed X-ray tube, an electron gun, an X-ray target, an internal electron mask, and an X-ray window consisting of a thin tube of material with low X-ray absorption and high mechanical strength, for example beryllium. The window connects the tube to the target assembly containing the X-ray target. The generator preferably also includes a system for focusing and steering the electron beam onto the target, a cooling system to cool the target material, kinematic mounts to allow precise and repeatable mounting of X-ray devices for focusing the X-ray beam, and X-ray focusing devices of varying configurations and methods. The X-ray generator of the invention produces an X-ray source having a focal spot or line of very small dimensions and is capable of producing a high intensity X-ray beam at a relatively small point of application using a low operating power.

Claims17

Dependent claims

X-ray generator comprising an electron gun, an X-ray tube, an electron focusing means and a stigmator, said X-ray tube comprising a target adapted to have an X-ray source formed thereon and an X-ray exit window of a material of low X-ray absorption, characterised in that:

the X-ray tube is evacuated and sealed;
the X-ray tube has a narrow portion having a tubular side wall;
the stigmator is positioned between the electron focusing means and the target;
the electron focusing means is arranged outside the X-ray tube around the narrow portion of the X-ray tube and is adapted to focus electrons from the electron gun to produce a stationary X-ray source on the target having a spot or line focus with a respective diameter or width less than 100 μm;
the electron focusing means comprises an x-y deflection system for centring the X-ray source;
and
the X-ray exit window is located in the tubular side wall adjacent to the target to allow close coupling of an X-ray focusing device outside the sealed X-ray tube adjacent to said window.

4 more elements

Dependencies are inferred from the claim text.