G05B 2219/32057
Control cell as function of correlation between stored and detected machine state
G05B2219/32057 (Control cell as function of correlation between stored and detected machine state) appears on 5 US grants and 6 published applications in this corpus.
Search patents in G05B- Granted patents
- 5
- Published applications
- 6
- Assignees
- 7
- Inventors
- 8
- Latest grant
- 15 Jan 2013
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2006 | 0 | 2 |
| 2007 | 0 | 0 |
| 2008 | 2 | 1 |
| 2009 | 1 | 1 |
| 2010 | 1 | 1 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 1 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 1 |
By publication year.
Recent patents
- Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility15 Jan 2013US 8,355,810 B2APPLIED Materials.Inc.
- Process control system, process control method, and method of manufacturing electronic apparatus9 Nov 2010US 7,831,330 B2Kabushiki Kaisha Toshiba
- Process control system, process control method, and method of manufacturing electronic apparatus29 Sep 2009US 7,596,421 B2Kabushik Kaisha Toshiba
- System for implementing intelligent and accurate updates to state-based advanced process control (APC) models9 Sep 2008US 7,424,331 B2Intel Corporation
- Method for manufacturing semiconductor device29 Jan 2008US 7,324,866 B2Matsushita Electric Industrial Co., Ltd.
- Control device, control system, control method, program, and recording medium22 Oct 2015US 2015/0301520 A1OMRON Corporation
- Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility29 Jul 2010US 2010/0191363 A1APPLIED Materials.Inc.
- Process control system, process control method, and method of manufacturing electronic apparatus5 Nov 2009US 2009/0276078 A1Kabushiki Kaisha Toshiba
- System for implementing intelligent and accurate updates to state-based advanced process control (APC) models19 Jun 2008US 2008/0147225 A1Intel Corporation
- Process control system, process control method, and method of manufacturing electronic apparatus21 Dec 2006US 2006/0287754 A1Kabushik Kaisha Toshiba
Most cited
By later US patents
- System for implementing intelligent and accurate updates to state-based advanced process control (APC) models11US 7,424,331 B2Intel Corporation · 2008
- Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility2US 8,355,810 B2APPLIED Materials.Inc. · 2013
- Method for manufacturing semiconductor device1US 7,324,866 B2Matsushita Electric Industrial Co., Ltd. · 2008