System for implementing intelligent and accurate updates to state-based advanced process control (APC) models

An apparatus, comprising:

• a metrology tool to perform at least one of a re-measurement or a data invalidation;
• an updater of a state-based advanced process control (APC) module to:
• reference a state value table and a state update table of the state-based APC module to determine a current state of lot measurements;
• and
• update the state value table and the state update table to reflect the at least one of the re-measurement or the data invalidation;
• a model calculation and update module to determine process variability patterns of the lot measurements based on the updated values in the state value table and the state update table;
• and
• a model inversion module to determine settings to apply to a lot at a process tool based on the process variability patterns.

An article of manufacture comprising a machine-readable medium including data that, when accessed by a machine, cause the machine to perform operations comprising:

• receiving at least one of a re-measurement or a data invalidation at a state-based advanced process control (APC) model;
• referencing a state value table and a state update table to determine a current state of lot measurements in the state-based APC model;
• updating the state value table and the state update table to reflect the at least one of the re-measurement or the data invalidation;
• and
• determining settings to apply to a lot at a process tool based on process variability patterns established by the state-based APC model from the updated values in the state value table and the state update table.