G05B 2219/31013
Second agv with wafers already underway before processing first finished
Official title: Second AGV with wafers already underway before processing first finished
G05B2219/31013 (Second agv with wafers already underway before processing first finished) appears on 10 US grants and 9 published applications in this corpus.
Search patents in G05B- Granted patents
- 10
- Published applications
- 9
- Assignees
- 10
- Inventors
- 43
- Latest grant
- 27 Aug 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 1 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 2 |
| 2015 | 1 | 0 |
| 2016 | 0 | 1 |
| 2017 | 1 | 0 |
| 2018 | 0 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 2 |
| 2023 | 1 | 0 |
| 2024 | 1 | 1 |
| 2025 | 0 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Model-based scheduling for substrate processing systems27 Aug 2024US 12,072,689 B2Lam Research Corporation
- Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method14 Nov 2023US 11,815,861 B2Canon Kabushiki Kaisha
- Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits25 Apr 2017US 9,632,499 B2Globalfoundries Inc.
- Processing facility21 Jul 2015US 9,086,697 B2Daifuku Co., Ltd.
- Ultra-flexible production manufacturing5 Aug 2014US 8,798,787 B2ABB Research Ltd.
- Model-based scheduling for substrate processing systems6 Feb 2025US 2025/0044775 A1Lam Research Corporation
- Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method1 Feb 2024US 2024/0036531 A1Canon Kabushiki Kaisha
- Model-based scheduling for substrate processing systems2 Jun 2022US 2022/0171373 A1Lam Research Corporation
- Feedback control device, article manufacturing method, and feedback control method7 Apr 2022US 2022/0107610 A1Canon Kabushiki Kaisha
- Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits5 May 2016US 2016/0126120 A1Globalfoundries Inc.
Most cited
By later US patents
- Semiconductor process system, its control method, computer readable memory, and device manufacturing method44US 6,148,246 ACanon Kabushiki Kaisha · 2000
- Conveyance system in a semiconductor manufacturing process and method for processing semiconductor wafer therein40US 6,298,274 B1Oki Electric Industry Co., Ltd. · 2001
- Substrate processing apparatus and method23US 5,687,085 ADainippon Screen Mfg.Co., Ltd. · 1997
- Semiconductor factory automation system and method for transporting semiconductor wafers9US 6,516,238 B1Hyundai Electronics Industries Co., Ltd. · 2003
- Processing facility8US 9,086,697 B2Daifuku Co., Ltd. · 2015