Semiconductor process system, its control method, computer readable memory, and device manufacturing method

A control method for a semiconductor process system, which comprises a semiconductor process apparatus for performing various jobs to manufacture a semiconductor device, material convey means for conveying materials used in the jobs to said semiconductor process apparatus, and a host computer for monitoring an operation state of said semiconductor process apparatus, instructing said material convey means to convey a material used in a required job, and instructing said semiconductor process apparatus to execute the job, comprising:

• the first control step of controlling said host computer to make a job reservation that informs said semiconductor process apparatus of the job to be executed simultaneously with the convey instruction of the material used in the required job;
• and
• the second control step of controlling said semiconductor process apparatus to confirm in accordance with the job reservation if job data required for the reserved job is present in said apparatus, and to take a predetermined measure if the job data is not present.

A computer readable memory that stores a program code for controlling a semiconductor process system, which comprises a semiconductor process apparatus for performing various jobs to manufacture a semiconductor device, material convey means for conveying materials used in the jobs to said semiconductor process apparatus, and a host computer for monitoring an operation state of said semiconductor process apparatus, instructing said material convey means to convey a material used in a required job, and instructing said semiconductor process apparatus to execute the job, comprising:

• a program code of the first control step of controlling said host computer to make a job reservation that informs said semiconductor process apparatus of the job to be executed simultaneously with the convey instruction of the material used in the required job;
• and
• a program code of the second control step of controlling said semiconductor process apparatus to confirm in accordance with the job reservation if job data required for the reserved job is present in said apparatus, and to take a predetermined measure if the job data is not present.

A device manufacturing method for manufacturing a semiconductor device by monitoring, using a host computer, an operation state of a semiconductor process apparatus for performing various jobs to manufacture the semiconductor device, instructing material convey means to convey a material used in a required job, and instructing said semiconductor process apparatus to execute the job, wherein said host computer makes a job reservation that informs said semiconductor process apparatus of the job to be executed simultaneously with the convey instruction of the material used in the required job, and said semiconductor process apparatus confirms in accordance with the job reservation if job data required for the reserved job is present in said apparatus, and takes a predetermined measure if the job data is not present.