G03B 27/74
Positioning exposure meters in the apparatus
G03B27/74 (Positioning exposure meters in the apparatus) appears on 15 US grants and 8 published applications in this corpus.
Search patents in G03B- Granted patents
- 15
- Published applications
- 8
- Assignees
- 10
- Inventors
- 27
- Latest grant
- 29 Sep 2009
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 1 |
| 2004 | 1 | 2 |
| 2005 | 2 | 1 |
| 2006 | 0 | 1 |
| 2007 | 1 | 0 |
| 2008 | 0 | 1 |
| 2009 | 2 | 2 |
By publication year. Applications have been published since 2001.
Recent patents
- Exposure apparatus and method of manufacturing device29 Sep 2009US 7,595,862 B2Canon Kabushiki Kaisha
- Exposure apparatus and device fabrication method25 Aug 2009US 7,580,116 B2Canon Kabushiki Kaisha
- Push feed arm for post processing device6 Feb 2007US 7,172,194 B2Toshiba Tec Kabushiki Kaisha
- Exposure apparatus19 Apr 2005US 6,882,407 B2Canon Kabushiki Kaisha
- Method of photolithographic exposure dose control as a function of resist sensitivity15 Feb 2005US 6,856,378 B2International Business Machines Corporation
- Measurement apparatus, exposure apparatus, and device manufacturing method22 Oct 2009US 2009/0262323 A1Canon Kabushiki Kaisha
- Exposure apparatus and device fabrication method15 Jan 2009US 2009/0015813 A1Canon Kabushiki Kaisha
- Exposure apparatus and method of manufacturing device3 Jan 2008US 2008/0002175 A1Canon Kabushiki Kaisha
- Sheet post-process apparatus and processing tray30 Mar 2006US 2006/0066831 A1Toshiba Tec Kabushiki Kaisha
- Semiconductor exposure apparatus and method for exposing semiconductor using the same29 Dec 2005US 2005/0286037 A1DongbuAnam Semiconductor Inc.
Most cited
By later US patents
- Auto exposure control device for reader-printer7US 4,591,264 AMinolta Camera Kabushiki Kaisha · 1986
- Push feed arm for post processing device6US 7,172,194 B2Toshiba Tec Kabushiki Kaisha · 2007
- Exposure apparatus and device fabrication method5US 7,580,116 B2Canon Kabushiki Kaisha · 2009
- Source distance adjustment arrangement for uniform illumination of projection surface4US 5,200,603 AAgfa-Gevaert · 1993
- Photographic printer3US 4,786,949 AFuji Photo Film Co., Ltd. · 1988