G01N 2201/0233
Gas purge
G01N2201/0233 (Gas purge) appears on 25 US grants and 26 published applications in this corpus.
Search patents in G01N- Granted patents
- 25
- Published applications
- 26
- Assignees
- 27
- Inventors
- 89
- Latest grant
- 17 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 1 | 1 |
| 2007 | 0 | 0 |
| 2008 | 0 | 1 |
| 2009 | 1 | 0 |
| 2010 | 1 | 2 |
| 2011 | 0 | 0 |
| 2012 | 2 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 1 | 1 |
| 2017 | 1 | 1 |
| 2018 | 0 | 2 |
| 2019 | 2 | 0 |
| 2020 | 1 | 4 |
| 2021 | 3 | 2 |
| 2022 | 2 | 1 |
| 2023 | 1 | 1 |
| 2024 | 1 | 4 |
| 2025 | 0 | 1 |
| 2026 | 3 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Gas flow configurations for semiconductor inspections17 Mar 2026US 12,578,285 B2KLA Corporation
- Gas analysis device and laser light transmission mechanism24 Feb 2026US 12,560,536 B2HORIBA STEC, Co., Ltd.
- Nitrous oxide sensor10 Feb 2026US 12,546,713 B2Medclair Sweden AB
- High-temperature optical probe11 Jun 2024US 12,007,330 B2Dow Global Technologies LLC
- Method and system for analyzing a sample desorbed at different temperatures using cavity ring-down spectroscopy, and a method for generating a predictive model17 Oct 2023US 11,788,957 B2Picomole Inc.
- Photonic resonator chip spectroscopy gas sensing16 Jul 2026US 2026/0202342 A1
- Photoacoustic gas sensor, leakage detection system for refrigerants, and heat pump9 Jul 2026US 2026/0194451 A1Infineon Technologies AG
- Temperature controlled optical system for an absorbance detector22 Jan 2026US 2026/0023056 A1
- Surface analysis system for air purification unit and air purification unit including the same28 Aug 2025US 2025/0271355 A1Korea Institute of Energy Technology
- Gas flow configurations for semiconductor inspections11 Jul 2024US 2024/0230555 A9KLA Corporation
Most cited
By later US patents
- Universal spectrometer system having modular sampling chamber33US 4,657,390 ALaser Precision Corporation · 1987
- Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry33US 7,755,764 B2KLA-Tencor Corporation · 2010
- Multichannel, optical-fiber-based spectrometer15US 4,755,054 AE-Squared Engineering, Inc. · 1988
- Modular surface inspection method and apparatus using optical fibers14US 5,164,603 AReynolds Metals Company · 1992
- Optical scanner with self contained standardization means11US 5,343,296 AABB Process Automation Inc. · 1994