G01N 21/95623
Using a spatial filtering method
Official title: {using a spatial filtering method (per se G02B)}
G01N21/95623 (Using a spatial filtering method) appears on 251 US grants and 195 published applications in this corpus.
Search patents in G01N- Granted patents
- 251
- Published applications
- 195
- Assignees
- 101
- Inventors
- 455
- Latest grant
- 14 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 2 | 0 |
| 1991 | 2 | 0 |
| 1992 | 5 | 0 |
| 1993 | 5 | 0 |
| 1994 | 3 | 0 |
| 1995 | 8 | 0 |
| 1996 | 3 | 0 |
| 1997 | 5 | 0 |
| 1998 | 5 | 0 |
| 1999 | 3 | 0 |
| 2000 | 6 | 0 |
| 2001 | 1 | 1 |
| 2002 | 1 | 5 |
| 2003 | 5 | 6 |
| 2004 | 7 | 11 |
| 2005 | 6 | 7 |
| 2006 | 7 | 17 |
| 2007 | 13 | 19 |
| 2008 | 8 | 12 |
| 2009 | 15 | 14 |
| 2010 | 14 | 9 |
| 2011 | 12 | 7 |
| 2012 | 9 | 9 |
| 2013 | 7 | 7 |
| 2014 | 11 | 7 |
| 2015 | 8 | 4 |
| 2016 | 8 | 7 |
| 2017 | 11 | 8 |
| 2018 | 5 | 9 |
| 2019 | 8 | 8 |
| 2020 | 12 | 8 |
| 2021 | 4 | 5 |
| 2022 | 5 | 4 |
| 2023 | 2 | 4 |
| 2024 | 3 | 3 |
| 2025 | 7 | 2 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Single-material waveplates for pupil polarization filtering14 Oct 2025US 12,444,630 B2KLA Corporation
- Method for filtering an image and associated metrology apparatus2 Sep 2025US 12,405,535 B2ASML Holding N. V.
- Method for measuring surface parameter of copper foil, and method for sorting copper foil26 Aug 2025US 12,399,001 B2Mitsui Mining & Smelting Co., Ltd.
- Finding semiconductor defects using convolutional context attributes8 Jul 2025US 12,353,970 B2KLA Corporation
- Reflective waveplates for pupil polarization filtering3 Jun 2025US 12,322,620 B2KLA Corporation
- Feature Transformer Architecture For Advanced Semiconductor Metrology28 May 2026US 2026/0147282 A1
- Single-Material Waveplates for Pupil Polarization Filtering29 Jan 2026US 2026/0033282 A1KLA Corporation
- Defect Inspection Apparatus and Defect Inspection Method17 Apr 2025US 2025/0123220 A1Hitachi High-Tech Corporation
- Pupil filter with spatially-varying transmission6 Feb 2025US 2025/0044679 A1KLA Corporation
- Method for measuring surface parameter of copper foil, and method for sorting copper foil19 Dec 2024US 2024/0418504 A1Mitsui Mining & Smelting Co., Ltd.
Most cited
By later US patents
- Real time optical correlation system299US 5,327,286 ATexas Instruments Incorporated · 1994
- Surface inspection system188US 5,864,394 AKLA-Tencor Corporation · 1999
- Speckle reduction track filter apparatus for optical inspection of patterned substrates144US 5,264,912 ATencor Instruments · 1993
- Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line135US 5,274,434 AHitachi, Ltd. · 1993
- Variable spot-size scanning apparatus135US 5,633,747 ATencor Instruments · 1997