G01D 5/38
By diffraction gratings
Official title: by diffraction gratings
G01D5/38 (By diffraction gratings) appears on 604 US grants and 381 published applications in this corpus.
Search patents in G01D- Granted patents
- 604
- Published applications
- 381
- Assignees
- 178
- Inventors
- 699
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 6 | 0 |
| 1978 | 2 | 0 |
| 1979 | 5 | 0 |
| 1980 | 5 | 0 |
| 1981 | 2 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 3 | 0 |
| 1986 | 4 | 0 |
| 1987 | 3 | 0 |
| 1988 | 8 | 0 |
| 1989 | 14 | 0 |
| 1990 | 21 | 0 |
| 1991 | 34 | 0 |
| 1992 | 21 | 0 |
| 1993 | 13 | 0 |
| 1994 | 11 | 0 |
| 1995 | 13 | 0 |
| 1996 | 25 | 0 |
| 1997 | 19 | 0 |
| 1998 | 15 | 0 |
| 1999 | 13 | 0 |
| 2000 | 7 | 0 |
| 2001 | 3 | 6 |
| 2002 | 8 | 5 |
| 2003 | 11 | 18 |
| 2004 | 10 | 13 |
| 2005 | 9 | 18 |
| 2006 | 21 | 14 |
| 2007 | 12 | 21 |
| 2008 | 16 | 24 |
| 2009 | 16 | 19 |
| 2010 | 13 | 14 |
| 2011 | 13 | 22 |
| 2012 | 11 | 22 |
| 2013 | 17 | 20 |
| 2014 | 25 | 13 |
| 2015 | 22 | 18 |
| 2016 | 17 | 13 |
| 2017 | 18 | 19 |
| 2018 | 24 | 20 |
| 2019 | 19 | 20 |
| 2020 | 22 | 16 |
| 2021 | 12 | 16 |
| 2022 | 12 | 8 |
| 2023 | 2 | 3 |
| 2024 | 12 | 6 |
| 2025 | 5 | 4 |
| 2026 | 3 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Optical encoder with a beam-shaping element11 Nov 2025US 12,467,772 B2Mitutoyo Corporation
- Optical displacement sensor12 Aug 2025US 12,385,735 B2Sensibel AS
- Sensor system for a high precision gimbal indicator30 Jul 2026US 2026/0219075 A1Raytheon Company
- Encoder apparatus23 Jul 2026US 2026/0210738 A1Renishaw PLC
- Encoder apparatus23 Jul 2026US 2026/0210739 A1Renishaw PLC
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- Fiber optic sensor and measurement method, apparatus and storage medium4 Jun 2026US 2026/0153366 A1Zhejiang Lab
Most cited
By later US patents
- Digital wavelength division multiplex optical transducer having an improved decoder107US 5,281,811 ALitton Systems, Inc. · 1994
- Optical detection apparatus for detecting information relating to relative displacement of an object on whch a diffraction grating is formed107US 5,666,196 ACanon Kabushiki Kaisha · 1997
- Optical encoder with misalignment detection and adjustment method associated therewith102US 8,895,911 B2Mitutoyo Corporation · 2014
- Displacement measurement systems lithographic apparatus and device manufacturing method91US 7,636,165 B2ASML Netherlands B. V. · 2009
- Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components83US 7,561,280 B2Agilent Technologies, Inc. · 2009