G01B 9/02071
By measuring path difference independently from interferometer
Official title: {by measuring path difference independently from interferometer}
G01B9/02071 (By measuring path difference independently from interferometer) appears on 49 US grants and 34 published applications in this corpus.
Search patents in G01B- Granted patents
- 49
- Published applications
- 34
- Assignees
- 34
- Inventors
- 101
- Latest grant
- 5 Mar 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 3 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 1 |
| 2003 | 2 | 3 |
| 2004 | 3 | 0 |
| 2005 | 0 | 2 |
| 2006 | 1 | 1 |
| 2007 | 0 | 0 |
| 2008 | 1 | 1 |
| 2009 | 2 | 2 |
| 2010 | 1 | 3 |
| 2011 | 4 | 3 |
| 2012 | 3 | 2 |
| 2013 | 0 | 2 |
| 2014 | 4 | 1 |
| 2015 | 1 | 1 |
| 2016 | 1 | 1 |
| 2017 | 2 | 2 |
| 2018 | 0 | 2 |
| 2019 | 1 | 3 |
| 2020 | 3 | 2 |
| 2021 | 2 | 0 |
| 2022 | 3 | 2 |
| 2023 | 0 | 0 |
| 2024 | 2 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- System and method for correcting optical path length measurement errors5 Mar 2024US 11,920,928 B2Tokyo Electron Limited
- Thickness evaluation method of cell sheet20 Feb 2024US 11,906,301 B2SCREEN Holdings Co., Ltd.
- Spatial accuracy correction method and apparatus21 Jun 2022US 11,366,447 B2Mitutoyo Corporation
- Spatial accuracy correction method and apparatus21 Jun 2022US 11,366,448 B2Mitutoyo Corporation
- Optical coherence tomographic device comprising dual correction beams of different path lengths8 Feb 2022US 11,243,066 B2Tomey Corporation
- System and method for correcting optical path length measurement errors10 Nov 2022US 2022/0357146 A1Tokyo Electron Limited
- Thickness evaluation method of cell sheet24 Mar 2022US 2022/0090909 A1SCREEN Holdings Co., Ltd.
- Automatic calibration optical interferometer and automatic calibration method of optical interferometer2 Jul 2020US 2020/0208958 A1Industrial Technology Research Institute
- Position measurement system, zeroing method, lithographic apparatus and device manufacturing method18 Jun 2020US 2020/0191552 A1ASML Netherlands B. V.
- Optical coherence tomographic device27 Jun 2019US 2019/0195614 A1Tomey Corporation
Most cited
By later US patents
- Doppler flow imaging using optical coherence tomography206US 6,006,128 A1999
- Systems and methods for phase measurements108US 7,365,858 B2Massachusetts Institute of Technology · 2008
- Scanning interferometry with reference signal69US 6,624,894 B2Veeco Instruments Inc. · 2003
- Interferometer arrangement with adjustable optical path length difference for detecting a distance between different layers of an eye67US 5,719,673 ACarl Zeiss Jena GmbH · 1998
- Associated dual interferometric measurement method for determining a physical property of an object49US 5,596,409 AEastman Kodak Company · 1997