G01B 9/02018
Multipass interferometers
Official title: Multipass interferometers, e.g. double-pass
G01B9/02018 (Multipass interferometers) appears on 147 US grants and 115 published applications in this corpus.
Search patents in G01B- Granted patents
- 147
- Published applications
- 115
- Assignees
- 64
- Inventors
- 191
- Latest grant
- 2 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 3 | 0 |
| 1988 | 2 | 0 |
| 1989 | 8 | 0 |
| 1990 | 3 | 0 |
| 1991 | 3 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 2 | 0 |
| 1995 | 4 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 3 | 0 |
| 1999 | 1 | 0 |
| 2000 | 3 | 0 |
| 2001 | 3 | 1 |
| 2002 | 2 | 3 |
| 2003 | 1 | 16 |
| 2004 | 8 | 5 |
| 2005 | 8 | 14 |
| 2006 | 5 | 10 |
| 2007 | 11 | 8 |
| 2008 | 13 | 4 |
| 2009 | 10 | 6 |
| 2010 | 3 | 2 |
| 2011 | 0 | 5 |
| 2012 | 3 | 1 |
| 2013 | 5 | 4 |
| 2014 | 1 | 4 |
| 2015 | 5 | 2 |
| 2016 | 5 | 4 |
| 2017 | 3 | 1 |
| 2018 | 4 | 6 |
| 2019 | 5 | 3 |
| 2020 | 2 | 5 |
| 2021 | 7 | 2 |
| 2022 | 1 | 0 |
| 2023 | 0 | 2 |
| 2024 | 0 | 3 |
| 2025 | 1 | 1 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Data age reduction2 Jun 2026US 12,644,692 B2Zygo Corporation
- Optical fiber sensor utilizing faraday rotator mirrors and measuring system using the same12 May 2026US 12,624,973 B2Hakusan Inc.
- Compact dual pass interferometer for a plane mirror interferometer8 Apr 2025US 12,270,644 B2ASML Netherlands B. V.
- Measuring assembly for the frequency-based determination of the position of a component15 Mar 2022US 11,274,914 B2Carl Zeiss SMT GmbH
- Optical angle sensor14 Dec 2021US 11,199,400 B2Mitutoyo Corporation
- Method for determining a position of a target by optical interferometry and device for doing the same30 Jul 2026US 2026/0219027 A1Prodrive Technologies Innovation Services B.V.
- Optical path length sensor7 May 2026US 2026/0126283 A1Lumiary AB
- Phase amplification microscopy19 Feb 2026US 2026/0049930 A1The Chinese University of Hong Kong
- Nanometrology device21 Aug 2025US 2025/0264321 A1National University of Singapore
- Optical fiber sensor and measuring system using the same1 Aug 2024US 2024/0255320 A1Hakusan Inc.
Most cited
By later US patents
- Differential interferometer system and lithographic step-and-scan apparatus provided with such a system426US 6,046,792 AU. S. Philips Corporation · 2000
- Method of and apparatus for measuring coordinate position and positioning an object86US 5,151,749 ANikon Corporation · 1992
- Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components83US 7,561,280 B2Agilent Technologies, Inc. · 2009
- Systems and methods for characterizing and correcting cyclic errors in distance measuring and dispersion interferometry75US 6,137,574 AZygo Corporation · 2000
- Linear-and-angular measuring plane mirror interferometer63US 5,064,289 AHewlett-Packard Company · 1991