Phase amplification microscopy

Abstract

A microscopic imaging method with sub-Ångström level measurement accuracy is provided. The method includes coupling a phase cavity with an interferometric imaging system to effectively amplify phase signals of a sample of interest; modeling resonance effects in the phase cavity; and optimizing parameters of the phase cavity, such as the materials of the phase cavity, lengths of each layer of the phase cavity, and illumination wavelength, to maximize amplification of phase signals of the sample of interest. The phase cavity is disposed on a sample side of the interferometric imaging system. The method may further include obtaining phase maps by the interferometric imaging systems based on laser illumination and performing a transfer-matrix based reversal model on the measured phase maps to reconstruct thickness mapping results. A measurement accuracy of 0.1 Å can be achieved for the interferometric imaging system.

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