Measuring assembly for the frequency-based determination of the position of a component
AssigneeCarl Zeiss SMT GmbH
InventorsMatthias Manger, Andreas Koeniger, Alexander Vogler
Life of this patent
Estimating the term…
Abstract
A measuring assembly for the frequency-based determination of the position of a component, in particular in an optical system for microlithography, includes at least one optical resonator, which has a stationary first resonator mirror, a movable measurement target assigned to the component, and a stationary second resonator mirror. The second resonator mirror is formed by an inverting mirror (130, 330, 430, 530), which reflects back on itself a measurement beam coming from the measurement target.
Claims22
A measuring assembly configured for frequency-based determination of a position of a component, comprising:
- at least one optical resonator that comprises a stationary first resonator mirror, a movable measurement target assigned to the component, and a stationary second resonator mirror, wherein an optical path through the resonator between the first resonator mirror and the measurement target is offset and parallel to the optical path between the second resonator mirror and the measurement target;
- wherein the second resonator mirror consists essentially of an inverting mirror, which reflects a measurement beam from the measurement target back on itself.
A measuring assembly configured for frequency-based determination of a position of a component, comprising:
- at least one optical resonator that comprises a stationary first resonator mirror, a movable measurement target assigned to the component, a stationary second resonator mirror, and an optical group comprising two lens elements in a Kepler arrangement;
- wherein the second resonator mirror consists essentially of an inverting mirror, which reflects a measurement beam from the measurement target back on itself,
- wherein the optical group comprises a mirror having an opening in a common focal plane of said two lens elements, and wherein the mirror of the optical group is configured to reflect the measurement beam back along the beam path returning from the measurement target.
Dependencies are inferred from the claim text.