C03B 19/143
Plasma vapour deposition
Official title: {Plasma vapour deposition}
C03B19/143 (Plasma vapour deposition) appears on 6 US grants and 8 published applications in this corpus.
Search patents in C03B- Granted patents
- 6
- Published applications
- 8
- Assignees
- 7
- Inventors
- 20
- Latest grant
- 9 Apr 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 1 | 1 |
| 2007 | 0 | 0 |
| 2008 | 0 | 1 |
| 2009 | 0 | 1 |
| 2010 | 0 | 0 |
| 2011 | 2 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 1 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 0 |
| 2019 | 0 | 1 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 1 | 1 |
| 2023 | 0 | 0 |
| 2024 | 1 | 0 |
By publication year.
Recent patents
- Process for the preparation of fluorinated quartz glass9 Apr 2024US 11,952,302 B2Heraeus Quarzglas GmbH & Co.KG
- Joining method for optical part21 Jun 2022US 11,365,146 B2Disco Corporation
- PCVD method and apparatus30 Jun 2015US 9,067,816 B2Draka Comteq B.V.
- Inductively-coupled plasma source28 Jun 2011US 7,969,096 B2MKS Instruments, Inc.
- Low expansion glass material having low expansivity gradient10 May 2011US 7,939,457 B2Corning Incorporated
- Process for the preparation of fluorinated quartz glass10 Feb 2022US 2022/0041488 A1Heraeus Quarzglas GmbH & Co.KG
- Joining method for optical part17 Oct 2019US 2019/0315646 A1Disco Corporation
- PCVD Method and Apparatus4 Jul 2013US 2013/0167593 A1Draka Comteq B.V.
- Low expansion glass material having low expansivity gradient4 Jun 2009US 2009/0143213 A1Corning Incorporated
- Inductively-coupled plasma source19 Jun 2008US 2008/0142729 A1MKS Instruments, Inc.
Most cited
By later US patents
- Inductively-coupled plasma source54US 7,969,096 B2MKS Instruments, Inc. · 2011
- Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides25US 7,079,740 B2APPLIED Materials.Inc. · 2006
- Low expansion glass material having low expansivity gradient2US 7,939,457 B2Corning Incorporated · 2011
- PCVD method and apparatus2US 9,067,816 B2Draka Comteq B.V. · 2015