Process for the preparation of fluorinated quartz glass
AssigneeHeraeus Quarzglas GmbH & Co. KG
InventorsStefan OCHS, Thomas KAYSER, Martin TROMMER, Andreas LANGNER, Sascha PIHAN, Kay SCHUSTER, Michael Hünermann
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Abstract
A process for the production of a fluorinated quartz glass including the steps of generating SiO2 particles in a synthesis burner; depositing the resulting SiO2 particles into a body; and vitrifying the resulting body, wherein a fluorinating agent having a boiling point greater than or equal to −10° C. is supplied to the synthesis burner.
Claims15
A process for the production of fluorinated quartz glass, characterized by:
- a. generation of SiO2 particles in a synthesis burner;
- b. deposition of the SiO2 particles resulting from process a. to form a body;
- and
- c. vitrification of the body resulting from process b,
- characterized in that a fluorinating agent having a boiling point of greater than or equal to −10° C. is introduced to the synthesis burner during process a.
Use of a fluorinating agent having a boiling point greater than or equal to −10° C. for the manufacture of fluorinated quartz glass.
Dependencies are inferred from the claim text.