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US 7,969,096 B2Granted
Inductively-coupled plasma source
AssigneeMKS Instruments, Inc.
InventorXing Chen
Life of this patent
Estimating the term…
Abstract
A method and apparatus for exciting gas that involves generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel that includes dielectric material. The magnetic field induces an electric field in the plasma vessel that generates the plasma.
Claims59
An inductively-coupled plasma source for exciting gases comprising:
- a. a plasma vessel comprising a dielectric material;
- and
- b. a transformer comprising a magnetic core defining a gap that generates an alternating magnetic field unidirectionally through the core, across the gap and through the plasma vessel which induces an electric field in the plasma vessel that generates a plasma.
A method for exciting gases with an inductively-coupled plasma source comprising:
- a. generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel comprising a dielectric material;
- b. inducing an electric field in the plasma vessel;
- and
- c. generating a plasma.
1 more element
An inductively-coupled plasma source for exciting gases comprising:
- a. means for generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel comprising a dielectric material;
- and
- b. means for inducing an electric field in the plasma vessel to generate a plasma.
Dependencies are inferred from the claim text.