Y10S 277/913
Seal for fluid pressure below atmospheric
Official title: Seal for fluid pressure below atmospheric, e.g. vacuum
Y10S277/913 (Seal for fluid pressure below atmospheric) appears on 102 US grants and 15 published applications in this corpus.
Search patents in Y10S- Granted patents
- 102
- Published applications
- 15
- Assignees
- 75
- Inventors
- 170
- Latest grant
- 3 Apr 2012
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 5 | 0 |
| 1978 | 4 | 0 |
| 1979 | 1 | 0 |
| 1980 | 3 | 0 |
| 1981 | 1 | 0 |
| 1982 | 2 | 0 |
| 1983 | 2 | 0 |
| 1984 | 6 | 0 |
| 1985 | 3 | 0 |
| 1986 | 2 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 4 | 0 |
| 1991 | 4 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 6 | 0 |
| 1996 | 8 | 0 |
| 1997 | 6 | 0 |
| 1998 | 3 | 0 |
| 1999 | 1 | 0 |
| 2000 | 3 | 0 |
| 2001 | 6 | 3 |
| 2002 | 2 | 1 |
| 2003 | 2 | 0 |
| 2004 | 2 | 3 |
| 2005 | 0 | 1 |
| 2006 | 4 | 2 |
| 2007 | 1 | 1 |
| 2008 | 1 | 1 |
| 2009 | 2 | 2 |
| 2010 | 1 | 0 |
| 2011 | 0 | 1 |
| 2012 | 2 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Vacuum apparatus of rotary motion entry3 Apr 2012US 8,146,923 B2Industrial Technology Research Institute
- Semiconductor process chamber31 Jan 2012US 8,104,770 B2Parker-Hannifin Corporation
- Compound sliding seal unit suitable for atmosphere to vacuum applications22 Jun 2010US 7,740,247 B2Advanced Ion Beam Technology, Inc.
- Sealing between vacuum chambers14 Jul 2009US 7,559,557 B2Varian Semiconductor Equipment Associates, Inc.
- Vacuum conveying apparatus and charged particle beam equipment with the same12 May 2009US 7,531,816 B2Hitachi High-Technologies Corporation
- Vacuum apparatus of rotary motion entry7 Apr 2011US 2011/0079963 A1Industrial Technology Research Institute
- Compound sliding seal unit suitable for atmosphere to vacuum applications12 Mar 2009US 2009/0066031 A1Advanced Ion Beam Technology, Inc.
- Sealing between vacuum chambers26 Feb 2009US 2009/0050825 A1Varian Semiconductor Equipment Associates, Inc.
- Semiconductor process chamber7 Aug 2008US 2008/0187430 A1Parker-Hannifin Corporation
- Vacuum conveying apparatus and charged particle beam equipment with the same8 Feb 2007US 2007/0029504 A1Hitachi High-Technologies Corporation
Most cited
By later US patents
- Method of and apparatus for purifying reduced pressure process chambers388US 6,135,460 ATexas Instruments Incorporated · 2000
- Scrubber vac-fan seal158US 5,943,730 ATennant Company · 1999
- Low temperature conduction module with gasket to provide a vacuum seal and electrical connections139US 5,247,424 AInternational Business Machines Corporation · 1993
- Electron beam lithographic apparatus57US 4,425,508 AGCA Corporation · 1984
- Sealing apparatus51US 5,368,648 ATokyo Electron Sagami Limited · 1994