Sealing between vacuum chambers
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsGregory D. Thronson, Jeffrey A. Burgess
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Abstract
A sealing system is disclosed. One such sealing system includes a first vacuum chamber and a second vacuum chamber. The sealing system includes a first sealing unit having a proximal end and a distal end, the proximal end of the first sealing unit disposed on the first vacuum chamber. The sealing system includes a second sealing unit having a distal end and a proximal end, the distal end of the second sealing unit disposed on the distal end of the first sealing unit and the proximal end of the second sealing unit disposed on the second vacuum chamber. One of the sealing units is concave, while the other is convex. The sealing system also includes a first o-ring, a second o-ring, and a third o-ring.
Claims22
A sealing system comprising:
- a first vacuum chamber having walls defining a first vacuum chamber aperture;
- a second vacuum chamber having walls defining a second vacuum chamber aperture;
- a first sealing unit having a body defining an opening, said first sealing unit having a proximal end and a distal end, said proximal end of said first sealing unit disposed on said first vacuum chamber;
- a first o-ring disposed between said first sealing unit and said first vacuum chamber;
- a second sealing unit having a body defining an opening, said second sealing unit having a distal end and a proximal end, said distal end of said second sealing unit disposed on said distal end of said first sealing unit, said proximal end of said second sealing unit disposed on said second vacuum chamber;
- a second o-ring disposed between said second sealing unit and said second vacuum chamber;
- and
- a third o-ring disposed between said second sealing unit and said first sealing unit.
An ion implanter comprising:
- an ion generator;
- a first vacuum chamber having walls defining a first vacuum chamber aperture;
- a second vacuum chamber having walls defining a second vacuum chamber aperture;
- a first sealing unit having a body defining an opening, said first sealing unit having a proximal end and a distal end, said proximal end of said first sealing unit disposed on said first vacuum chamber;
- a first o-ring disposed between said first sealing unit and said first vacuum chamber;
- a second sealing unit having a body defining an opening, said second sealing unit having a distal end and a proximal end, said distal end of said second sealing unit disposed on said distal end of said first sealing unit, said proximal end of said second sealing unit disposed on said second vacuum chamber;
- a second o-ring disposed between said second sealing unit and said second vacuum chamber;
- and
- a third o-ring disposed between said second sealing unit and said first sealing unit.
Dependencies are inferred from the claim text.