Y10S 118/90
Semiconductor vapor doping
Y10S118/90 (Semiconductor vapor doping) appears on 65 US grants and 20 published applications in this corpus.
Search patents in Y10S- Granted patents
- 65
- Published applications
- 20
- Assignees
- 36
- Inventors
- 102
- Latest grant
- 29 Dec 2020
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 2 | 0 |
| 1978 | 4 | 0 |
| 1979 | 2 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 3 | 0 |
| 1983 | 1 | 0 |
| 1984 | 8 | 0 |
| 1985 | 5 | 0 |
| 1986 | 2 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 2 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 5 | 1 |
| 2002 | 3 | 4 |
| 2003 | 1 | 2 |
| 2004 | 5 | 1 |
| 2005 | 2 | 3 |
| 2006 | 3 | 0 |
| 2007 | 0 | 2 |
| 2008 | 0 | 0 |
| 2009 | 2 | 1 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 1 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 1 | 0 |
| 2016 | 0 | 1 |
| 2017 | 0 | 0 |
| 2018 | 1 | 1 |
| 2019 | 2 | 1 |
| 2020 | 1 | 1 |
| 2021 | 0 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Semiconductor device and semiconductor device production system29 Dec 2020US 10,879,272 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system24 Dec 2019US 10,515,983 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system23 Jul 2019US 10,361,222 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system20 Feb 2018US 9,899,419 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system3 Nov 2015US 9,178,069 B2Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system22 Apr 2021US 2021/0118916 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system30 Apr 2020US 2020/0135770 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system7 Nov 2019US 2019/0341404 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system5 Jul 2018US 2018/0190677 A1Semiconductor Energy Laboratory Co.Ltd.
- Semiconductor device and semiconductor device production system21 Apr 2016US 2016/0111451 A1Semiconductor Energy Laboratory Co.Ltd.
Most cited
By later US patents
- Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus487US 6,828,235 B2Hitachi Kokusai Electric Inc. · 2004
- Magnetoplasmadynamic apparatus for the separation and deposition of materials104US 4,487,162 A1984
- Vapor deposition of single crystal gallium nitride69US 4,144,116 AU. S. Philips Corporation · 1979
- Multiple chamber deposition and isolation system and method69US 4,438,723 AEnergy Conversion Devices, Inc. · 1984
- Non-single-crystalline semiconductor layer on a substrate and method of making same62US 4,461,783 A1984