G05B 2219/49361
Workpiece and tool have each own rotation speed
G05B2219/49361 (Workpiece and tool have each own rotation speed) appears on 9 US grants and 8 published applications in this corpus.
Search patents in G05B- Granted patents
- 9
- Published applications
- 8
- Assignees
- 6
- Inventors
- 17
- Latest grant
- 27 Apr 2021
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 0 |
| 2006 | 1 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 1 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 1 |
| 2017 | 1 | 2 |
| 2018 | 1 | 0 |
| 2019 | 0 | 1 |
| 2020 | 1 | 0 |
| 2021 | 1 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 0 |
| 2024 | 0 | 1 |
By publication year. Applications have been published since 2001.
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Most cited
By later US patents
- Wafer polishing method and apparatus209US 5,329,732 ASpeedfam Corporation · 1994
- Wafer polishing method and apparatus157US 5,498,199 ASpeedfam Corporation · 1996
- Wafer polishing method and apparatus64US 5,498,196 ASpeedfam Corporation · 1996
- Apparatus for uniform chemical mechanical polishing by intermittent lifting and reversible rotation9US 6,146,241 AFujitsu Limited · 2000
- Machine tools3US 10,040,151 B2ROLLS-ROYCE plc · 2018