G05B 2219/31202
Semiconductor equipment communication standard secs
Official title: Semiconductor equipment communication standard SECS
G05B2219/31202 (Semiconductor equipment communication standard secs) appears on 10 US grants and 8 published applications in this corpus.
Search patents in G05B- Granted patents
- 10
- Published applications
- 8
- Assignees
- 8
- Inventors
- 46
- Latest grant
- 12 Sep 2023
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 0 | 1 |
| 2003 | 0 | 1 |
| 2004 | 2 | 0 |
| 2005 | 0 | 0 |
| 2006 | 1 | 0 |
| 2007 | 1 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 2 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 1 | 0 |
| 2014 | 0 | 0 |
| 2015 | 1 | 0 |
| 2016 | 0 | 1 |
| 2017 | 0 | 0 |
| 2018 | 1 | 1 |
| 2019 | 0 | 1 |
| 2020 | 2 | 0 |
| 2021 | 0 | 1 |
| 2022 | 0 | 0 |
| 2023 | 1 | 0 |
By publication year.
Recent patents
- Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium12 Sep 2023US 11,754,989 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium1 Dec 2020US 10,852,704 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Relay device and manufacturing system26 May 2020US 10,663,951 B2Fuji Corporation
- Mobile connectivity and control of semiconductor manufacturing equipment27 Mar 2018US 9,927,798 B2Lam Research Corporation
- Arrangement for identifying uncontrolled events at the process module level and methods thereof17 Mar 2015US 8,983,631 B2Lam Research Corporation
- Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium4 Mar 2021US 2021/0063984 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium30 May 2019US 2019/0163149 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Relay device and manufacturing system14 Jun 2018US 2018/0164786 A1Fuji Machine Mfg. Co., Ltd.
- Mobile connectivity and control of semiconductor manufacturing equipment14 Apr 2016US 2016/0103445 A1Lam Research Corporation
- Arrangement for identifying uncontrolled events at the process module level and methods thereof30 Dec 2010US 2010/0332012 A1Lam Research Corporation
Most cited
By later US patents
- Computer integrated manufacturing techniques73US 7,069,101 B1APPLIED Materials.Inc. · 2006
- Computer integrated manufacturing techniques42US 7,174,230 B2APPLIED Materials.Inc. · 2007
- System and method for automatically generating semiconductor equipment communication standard (SECS) message source in SECS communication7US 6,721,618 B2Miracom, Inc. · 2004
- Supervisory parallel switching device for computer integrated manufacturing system with secs-compliant serial communication links3US 6,694,201 B1Industrial Technology Research Institute · 2004
- Mobile connectivity and control of semiconductor manufacturing equipment3US 9,927,798 B2Lam Research Corporation · 2018