Computer integrated manufacturing techniques

An apparatus for processing a product, the apparatus comprising:

• a) product processing equipment;
• b) at least one central processing unit for electronic data processing;
• c) a link for operably linking the central processing unit to the product processing equipment;
• d) a memory for storing digitally coded data structures, wherein the memory is operably linked to the at least one central processing unit;
• and
• e) a digitally coded first data structure stored in the memory wherein the data structure comprises a factory automation lifecycle including:
• (1) administrating lifecycle activity framework components,
• (2) factory modeling lifecycle activity framework components, and
• (3) manufacturing, controlling and tracking lifecycle activity framework components that include a visual workflow component configured to execute at least one manufacturing process and at least one business process.

A data storage device comprising a digitally coded first data structure including a factory automation lifecycle having:

• a) administrating lifecycle activity framework components;
• b) factory modeling lifecycle activity framework components;
• and
• c) manufacturing controlling and tracking lifecycle activity framework components that include a visual workflow component configured to execute at least one manufacturing process and at least one business process.

A computer implemented method of automating a factory for manufacturing semiconductor devices, the method comprising the acts of:

• a) developing and installing control software for automating the factory;
• b) modeling tools and manufacturing processes of the factory;
• c) generating a plan to manufacture one or more semiconductor devices;
• d) controlling, tracking and monitoring manufacture of the semiconductor devices according to the plan;
• e) analyzing manufacturing results, wherein at least one of acts a), b) and c) is modified based on the results;
• and
• f) constructing one or more framework components configured to allow a user to conduct acts a)–e), wherein said framework components include a visual workflow component.

A computer implemented method of automating a factory for manufacturing semiconductor devices, the method comprising the acts of:

• constructing a software framework configured to conduct a plurality of lifecycle activities, wherein the lifecycle activities comprise:
• a) developing and integrating control software for automating the factory;
• b) installing and administrating the control software;
• c) modeling tools of the factory;
• d) generating a plan to manufacture semiconductor devices;
• e) controlling, tracking and monitoring manufacture of the semiconductor devices according to the plan;
• and
• f) analyzing manufacturing results, wherein at least one of acts a), c) and d) is modified based on the results.

A computer implemented system for automating a factory for manufacturing semiconductor devices, the system comprising:

• a software framework configured to conduct a plurality of lifecycle activities, wherein the software framework comprises:
• a) means for developing and integrating control software for automating the factory;
• b) means for installing and administrating the control software;
• c) means for modeling tools and manufacturing processes of the factory;
• d) means for modeling manufacturing processes of the factory;
• e) means for generating a plan to manufacture semiconductor devices;
• f) means for controlling, tracking and monitoring manufacture of the semiconductor devices according to the plan;
• and
• g) means for analyzing manufacturing results, wherein at least one of acts a), c) and d) is modified based on the results wherein said software framework includes a visual workflow component.

A computer readable medium for storing instructions being executed by one or more computers, the instructions directing the one or more computers for automating a factory for manufacturing semiconductor devices, the instructions comprising the acts of:

• constructing a software framework configured to conduct a plurality of lifecycle activities, wherein the lifecycle activities comprise:
• a) developing and integrating control software for automating the factory;
• b) installing and administrating the control software;
• c) modeling tools of the factory;
• d) generating a plan to manufacture semiconductor devices;
• e) controlling, tracking and monitoring manufacture of the semiconductor devices according to the plan;
• and
• f) analyzing manufacturing results, wherein at least one of acts a), c) and d) is modified based on the results, wherein said software framework includes a visual workflow component.

A method for defining a computer implemented factory automation lifecycle, the method comprising:

• a) installing and administrating lifecycle activity framework components;
• b) factory modeling lifecycle activity framework components;
• and
• c) manufacturing controlling, monitoring and tracking lifecycle activity framework components that include a visual workflow component.