G03H 2260/63
Indirect etching
Official title: Indirect etching, e.g. lithography
G03H2260/63 (Indirect etching) appears on 40 US grants and 31 published applications in this corpus.
Search patents in G03H- Granted patents
- 40
- Published applications
- 31
- Assignees
- 34
- Inventors
- 107
- Latest grant
- 2 Sep 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 3 | 0 |
| 1990 | 0 | 0 |
| 1991 | 3 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 2 |
| 2002 | 0 | 1 |
| 2003 | 0 | 1 |
| 2004 | 2 | 4 |
| 2005 | 1 | 2 |
| 2006 | 3 | 2 |
| 2007 | 1 | 1 |
| 2008 | 2 | 1 |
| 2009 | 0 | 2 |
| 2010 | 2 | 0 |
| 2011 | 1 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 1 |
| 2014 | 0 | 0 |
| 2015 | 1 | 3 |
| 2016 | 2 | 0 |
| 2017 | 1 | 0 |
| 2018 | 1 | 1 |
| 2019 | 0 | 3 |
| 2020 | 0 | 0 |
| 2021 | 2 | 2 |
| 2022 | 1 | 1 |
| 2023 | 1 | 1 |
| 2024 | 1 | 1 |
| 2025 | 1 | 1 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method and device for compensating surface error of holographic grating substrate2 Sep 2025US 12,405,570 B2Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
- Holographic optical element and method of forming thereof12 Mar 2024US 11,927,785 B2Singapore University of Technology and Design
- Fabrication method of holographic security label19 Dec 2023US 11,846,888 B2Kaunas University of Technology
- Optical film28 Jun 2022US 11,373,344 B2Toppan Printing Co., Ltd.
- Method of building a 3D functional optical material layer stacking structure30 Nov 2021US 11,187,836 B2APPLIED Materials.Inc.
- Harmonic Gratings Utilizing Evacuated Periodic Structures27 Aug 2026US 2026/0251829 A1DigiLens Inc.
- Method and device for compensating surface error of holographic grating substrate27 Feb 2025US 2025/0068123 A1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
- Method of building a 3d functional optical material stacking structure6 Jun 2024US 2024/0184024 A1APPLIED Materials.Inc.
- Hologram color designation system and hologram color designation method based on dithering mask14 Dec 2023US 2023/0400810 A1Ulsan National Institute of Science and Technology (UNIST)
- Method of building a 3d functional optical material layer stacking structure17 Mar 2022US 2022/0082738 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Volume phase reflection holograms and methods for fabricating them81US 4,888,260 APolaroid Corporation · 1989
- Holographic optical data storage medium80US 4,999,234 APolaroid Corporation · 1991
- Process for making holographic embossing tools50US 5,521,030 A1996
- Computer generated holographic microtags46US 5,729,365 ASandia Corporation · 1998
- Method of replicating volume phase reflection holograms39US 4,839,250 APolaroid Corporation, Patent Department · 1989