G02B 27/425

In illumination systems

Official title: {in illumination systems (mask illumination systems in photolithographic systems G03F7/70158)}

G02B27/425 (In illumination systems) appears on 324 US grants and 376 published applications in this corpus.

Search patents in G02B
Granted patents
324
Published applications
376
Assignees
211
Inventors
703
Latest grant
25 Aug 2026

Filings by year

G02B 27/425: granted patents and published applications per publication year
YearGranted patentsPublished applications
197610
197700
197800
197910
198000
198100
198200
198300
198400
198500
198600
198700
198800
198900
199000
199120
199210
199310
199410
199500
199600
199700
199800
199910
200000
200112
200222
200351
200404
200532
200623
200733
200813
200924
201026
201123
201247
201335
201444
2015312
2016929
20172142
20182118
20193853
20204068
20213646
20223921
20233318
20242810
2025119
202631

By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.