G01J 2009/0219
Using two or more gratings
Official title: {using two or more gratings}
G01J2009/0219 (Using two or more gratings) appears on 21 US grants and 18 published applications in this corpus.
Search patents in G01J- Granted patents
- 21
- Published applications
- 18
- Assignees
- 21
- Inventors
- 43
- Latest grant
- 20 Aug 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 1 | 1 |
| 2008 | 0 | 0 |
| 2009 | 1 | 0 |
| 2010 | 0 | 2 |
| 2011 | 1 | 0 |
| 2012 | 0 | 0 |
| 2013 | 1 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 1 |
| 2016 | 0 | 2 |
| 2017 | 1 | 0 |
| 2018 | 2 | 2 |
| 2019 | 2 | 2 |
| 2020 | 2 | 1 |
| 2021 | 2 | 2 |
| 2022 | 1 | 1 |
| 2023 | 0 | 0 |
| 2024 | 2 | 1 |
| 2025 | 0 | 0 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Single grab overlay measurement of tall targets20 Aug 2024US 12,066,322 B2KLA Corporation
- Metrology system and method for measuring an excitation laser beam in an EUV plasma source5 Mar 2024US 11,920,977 B2Carl Zeiss SMT GmbH
- Method for high-accuracy wavefront measurement base on grating shearing interferometry24 May 2022US 11,340,118 B2Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Device and method for detecting projection objective wave-front aberration8 Jun 2021US 11,029,611 B2Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Method for wavefront measurement of optical imaging system based on grating shearing interferometry18 May 2021US 11,009,336 B2Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Polarimetric phase imaging13 Aug 2026US 2026/0235445 A1Centre National De La Recherche Scientifique
- Methods and system for determining aberrations of a projection system12 Mar 2026US 2026/0071918 A1ASML Netherlands B. V.
- Single grab overlay measurement of tall targets16 May 2024US 2024/0159585 A1KLA Corporation
- Method for high-accuracy wavefront measurement base on grating shearing interferometry10 Mar 2022US 2022/0074793 A1Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Metrology system and method for measuring an excitation laser beam in an euv plasma source24 Jun 2021US 2021/0190583 A1Carl Zeiss SMT GmbH
Most cited
By later US patents
- Spatial heterodyne spectrometer and method28US 5,059,027 AWisconsin Alumni Research Foundation · 1991
- Method for measuring an optical length of light path and a laser interferometer for carrying same into effect25US 4,558,952 A1985
- Wavefront sensor using a surface acoustic wave diffraction grating14US 4,474,467 AItek Corporation · 1984
- High stability interferometer for measuring small changes in refractive index and measuring method using the interferometer8US 5,074,666 AAgency of Industrial Science and Technology · 1991
- Parallel light ray measuring apparatus8US 5,170,221 AOkuma Corporation · 1992