G01D 5/266
By interferometric means
Official title: {by interferometric means (G01D5/353 takes precedence)}
G01D5/266 (By interferometric means) appears on 294 US grants and 217 published applications in this corpus.
Search patents in G01D- Granted patents
- 294
- Published applications
- 217
- Assignees
- 192
- Inventors
- 588
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 1 | 0 |
| 1984 | 3 | 0 |
| 1985 | 1 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 8 | 0 |
| 1989 | 9 | 0 |
| 1990 | 5 | 0 |
| 1991 | 9 | 0 |
| 1992 | 10 | 0 |
| 1993 | 8 | 0 |
| 1994 | 11 | 0 |
| 1995 | 5 | 0 |
| 1996 | 1 | 0 |
| 1997 | 4 | 0 |
| 1998 | 3 | 0 |
| 1999 | 4 | 0 |
| 2000 | 6 | 0 |
| 2001 | 2 | 1 |
| 2002 | 0 | 6 |
| 2003 | 5 | 3 |
| 2004 | 1 | 7 |
| 2005 | 1 | 4 |
| 2006 | 4 | 7 |
| 2007 | 5 | 8 |
| 2008 | 10 | 5 |
| 2009 | 9 | 5 |
| 2010 | 7 | 7 |
| 2011 | 4 | 11 |
| 2012 | 4 | 7 |
| 2013 | 5 | 11 |
| 2014 | 8 | 9 |
| 2015 | 12 | 18 |
| 2016 | 17 | 17 |
| 2017 | 13 | 20 |
| 2018 | 25 | 15 |
| 2019 | 18 | 9 |
| 2020 | 12 | 9 |
| 2021 | 5 | 5 |
| 2022 | 4 | 5 |
| 2023 | 4 | 13 |
| 2024 | 6 | 7 |
| 2025 | 11 | 5 |
| 2026 | 5 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Sensors for measuring pressure and temperature11 Aug 2026US 12,704,428 B2Simmonds Precision Products, Inc.
- Data age reduction2 Jun 2026US 12,644,692 B2Zygo Corporation
- Extrinsic Fabry-Perot absolute pressure sensor24 Feb 2026US 12,560,500 B2Davidson Instruments Inc.
- High temperature mold gap measurement using optical fiber interferometry3 Feb 2026US 12,540,814 B2The Curators of the University of Missouri
- Method for determining a position of a mirror6 Jan 2026US 12,516,963 B2Carl Zeiss SMT GmbH
- Rugged temperature tolerant extrinsic fabry-perot pressure sensor25 Jun 2026US 2026/0177440 A1Davidson Instruments Inc.
- Position measurement method and device18 Jun 2026US 2026/0168822 A1Brightest Technology Taiwan Co., Ltd.
- Method and device for determining at least one corrective value for an actual phase value to be corrected and also for determining a resulting phase value16 Apr 2026US 2026/0104274 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Optical sensor20 Nov 2025US 2025/0354837 A1WIKA Optical Sensing Limited
- Displacement detecting apparatus13 Nov 2025US 2025/0347537 A1Magnescale Co., Ltd.
Most cited
By later US patents
- Variable interferometric device and a process for the production of the same412US 4,859,060 A501 Sharp Kabushiki Kaisha · 1989
- Optical modulation apparatus and measurement method198US 5,091,983 A1992
- Fabry-Perot optical sensing device for measuring a physical parameter134US 5,392,117 AInstitut National D'Optique · 1995
- Fabry-perot optical sensing device for measuring a physical parameter128US 5,202,939 AHer Majesty the Queen in right of Canada, as represented by the Minister des Transports · 1993
- Method of decoding a spectrally modulated light signal128US 5,400,140 AFisher-Rosemount Limited · 1995